Thermoelectric phonon-glass electron-crystal via ion beam patterning of silicon

Taishan Zhu; Krishnan Swaminathan-Gopalan; Kelly Stephani; Elif Ertekin

doi:10.1103/physrevb.97.174201

Thermoelectric phonon-glass electron-crystal via ion beam patterning of silicon

Physical Review B ◽

10.1103/physrevb.97.174201 ◽

2018 ◽

Vol 97 (17) ◽

Cited By ~ 12

Author(s):

Taishan Zhu ◽

Krishnan Swaminathan-Gopalan ◽

Kelly Stephani ◽

Elif Ertekin

Keyword(s):

Ion Beam ◽

Electron Crystal ◽

Ion Beam Patterning

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High-speed focused-ion-beam patterning for guiding the growth of anodic alumina nanochannel arrays

Applied Physics Letters ◽

10.1063/1.1555689 ◽

2003 ◽

Vol 82 (8) ◽

pp. 1281-1283 ◽

Cited By ~ 71

Author(s):

N. W. Liu ◽

A. Datta ◽

C. Y. Liu ◽

Y. L. Wang

Keyword(s):

High Speed ◽

Focused Ion Beam ◽

Ion Beam ◽

Anodic Alumina ◽

Ion Beam Patterning ◽

Nanochannel Arrays

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Focused ion beam patterning of III–V crystals at low temperature: A method for improving the ion-induced defect localization

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1328054 ◽

2000 ◽

Vol 18 (6) ◽

pp. 3162 ◽

Cited By ~ 2

Author(s):

M. Schneider ◽

J. Gierak ◽

J. Y. Marzin ◽

B. Gayral ◽

J. M. Gérard

Keyword(s):

Low Temperature ◽

Focused Ion Beam ◽

Ion Beam ◽

Defect Localization ◽

Ion Beam Patterning

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Superconducting thin films and ion beam patterning using metal carboxylate precursors

Solid State Ionics ◽

10.1016/0167-2738(89)90397-4 ◽

1989 ◽

Vol 32-33 ◽

pp. 1051-1055 ◽

Cited By ~ 3

Author(s):

M GROSS ◽

P GALLAGHER ◽

W BROWN

Keyword(s):

Thin Films ◽

Ion Beam ◽

Superconducting Thin Films ◽

Metal Carboxylate ◽

Ion Beam Patterning

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Fabrication of complementary metal-oxide-semiconductor integrated nanomechanical devices by ion beam patterning

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3253550 ◽

2009 ◽

Vol 27 (6) ◽

pp. 2691 ◽

Cited By ~ 13

Author(s):

G. Rius ◽

J. Llobet ◽

X. Borrisé ◽

N. Mestres ◽

A. Retolaza ◽

...

Keyword(s):

Metal Oxide ◽

Ion Beam ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Ion Beam Patterning

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Quantum device microfabrication: Resolution limits of ion beam patterning

Applied Physics Letters ◽

10.1063/1.101876 ◽

1989 ◽

Vol 55 (4) ◽

pp. 377-379 ◽

Cited By ~ 35

Author(s):

A. Scherer ◽

M. L. Roukes

Keyword(s):

Ion Beam ◽

Quantum Device ◽

Resolution Limits ◽

Ion Beam Patterning

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Effect of Focused Ion Beam Patterning on Enlarging Anodization Window and Interpore Distance for Ordered Porous Anodic Alumina

Ceramic Transactions Series - Advances in Nanomaterials and Nanostructures ◽

10.1002/9781118144602.ch1 ◽

2011 ◽

pp. 1-11 ◽

Cited By ~ 1

Author(s):

Bo Chen ◽

Kathy Lu ◽

Zhipeng Tian

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Anodic Alumina ◽

Porous Anodic Alumina ◽

Interpore Distance ◽

Ordered Porous ◽

Ion Beam Patterning

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Kirigami brings new dimensions of cutting-edge nanophotonics to ion beam patterning

Scilight ◽

10.1063/1.5055377 ◽

2018 ◽

Vol 2018 (37) ◽

pp. 370001

Author(s):

J. H. Majors

Keyword(s):

Ion Beam ◽

Cutting Edge ◽

Ion Beam Patterning

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Preparation of Polyacrylonitrile/Graphene Oxide Nanocomposite-Derived Carbon Microstructures by Ion Beam Patterning and Post-Pyrolysis

Science of Advanced Materials ◽

10.1166/sam.2016.2453 ◽

2016 ◽

Vol 8 (8) ◽

pp. 1714-1718 ◽

Cited By ~ 1

Author(s):

Chang-Hee Jung ◽

Jin-Mook Jung ◽

In-Tae Hwang ◽

Chan-Hee Jung ◽

Jae-Hak Choi ◽

...

Keyword(s):

Graphene Oxide ◽

Ion Beam ◽

Ion Beam Patterning

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Ion Beam Patterning of High-Density STT-RAM Devices

IEEE Transactions on Magnetics ◽

10.1109/tmag.2016.2603921 ◽

2017 ◽

Vol 53 (2) ◽

pp. 1-4 ◽

Cited By ~ 3

Author(s):

Vincent Ip ◽

Shuogang Huang ◽

Santino D. Carnevale ◽

Ivan L. Berry ◽

Katrina Rook ◽

...

Keyword(s):

Ion Beam ◽

High Density ◽

Ion Beam Patterning

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Critical issues in the focused ion beam patterning of nanometric hole matrixes on GaAs based semiconducting devices

Nanotechnology ◽

10.1088/0957-4484/17/6/036 ◽

2006 ◽

Vol 17 (6) ◽

pp. 1758-1762 ◽

Cited By ~ 11

Author(s):

M Catalano ◽

A Taurino ◽

M Lomascolo ◽

A Schertel ◽

A Orchowski

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Critical Issues ◽

Ion Beam Patterning

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