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Quantum device microfabrication: Resolution limits of ion beam patterning
Applied Physics Letters
◽
10.1063/1.101876
◽
1989
◽
Vol 55
(4)
◽
pp. 377-379
◽
Cited By ~ 35
Author(s):
A. Scherer
◽
M. L. Roukes
Keyword(s):
Ion Beam
◽
Quantum Device
◽
Resolution Limits
◽
Ion Beam Patterning
Download Full-text
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References
High-speed focused-ion-beam patterning for guiding the growth of anodic alumina nanochannel arrays
Applied Physics Letters
◽
10.1063/1.1555689
◽
2003
◽
Vol 82
(8)
◽
pp. 1281-1283
◽
Cited By ~ 71
Author(s):
N. W. Liu
◽
A. Datta
◽
C. Y. Liu
◽
Y. L. Wang
Keyword(s):
High Speed
◽
Focused Ion Beam
◽
Ion Beam
◽
Anodic Alumina
◽
Ion Beam Patterning
◽
Nanochannel Arrays
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Focused ion beam patterning of III–V crystals at low temperature: A method for improving the ion-induced defect localization
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.1328054
◽
2000
◽
Vol 18
(6)
◽
pp. 3162
◽
Cited By ~ 2
Author(s):
M. Schneider
◽
J. Gierak
◽
J. Y. Marzin
◽
B. Gayral
◽
J. M. Gérard
Keyword(s):
Low Temperature
◽
Focused Ion Beam
◽
Ion Beam
◽
Defect Localization
◽
Ion Beam Patterning
Download Full-text
Superconducting thin films and ion beam patterning using metal carboxylate precursors
Solid State Ionics
◽
10.1016/0167-2738(89)90397-4
◽
1989
◽
Vol 32-33
◽
pp. 1051-1055
◽
Cited By ~ 3
Author(s):
M GROSS
◽
P GALLAGHER
◽
W BROWN
Keyword(s):
Thin Films
◽
Ion Beam
◽
Superconducting Thin Films
◽
Metal Carboxylate
◽
Ion Beam Patterning
Download Full-text
Fabrication of complementary metal-oxide-semiconductor integrated nanomechanical devices by ion beam patterning
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
◽
10.1116/1.3253550
◽
2009
◽
Vol 27
(6)
◽
pp. 2691
◽
Cited By ~ 13
Author(s):
G. Rius
◽
J. Llobet
◽
X. Borrisé
◽
N. Mestres
◽
A. Retolaza
◽
...
Keyword(s):
Metal Oxide
◽
Ion Beam
◽
Complementary Metal Oxide Semiconductor
◽
Metal Oxide Semiconductor
◽
Oxide Semiconductor
◽
Ion Beam Patterning
Download Full-text
Effect of Focused Ion Beam Patterning on Enlarging Anodization Window and Interpore Distance for Ordered Porous Anodic Alumina
Ceramic Transactions Series - Advances in Nanomaterials and Nanostructures
◽
10.1002/9781118144602.ch1
◽
2011
◽
pp. 1-11
◽
Cited By ~ 1
Author(s):
Bo Chen
◽
Kathy Lu
◽
Zhipeng Tian
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Anodic Alumina
◽
Porous Anodic Alumina
◽
Interpore Distance
◽
Ordered Porous
◽
Ion Beam Patterning
Download Full-text
Thermoelectric phonon-glass electron-crystal via ion beam patterning of silicon
Physical Review B
◽
10.1103/physrevb.97.174201
◽
2018
◽
Vol 97
(17)
◽
Cited By ~ 12
Author(s):
Taishan Zhu
◽
Krishnan Swaminathan-Gopalan
◽
Kelly Stephani
◽
Elif Ertekin
Keyword(s):
Ion Beam
◽
Electron Crystal
◽
Ion Beam Patterning
Download Full-text
Kirigami brings new dimensions of cutting-edge nanophotonics to ion beam patterning
Scilight
◽
10.1063/1.5055377
◽
2018
◽
Vol 2018
(37)
◽
pp. 370001
Author(s):
J. H. Majors
Keyword(s):
Ion Beam
◽
Cutting Edge
◽
Ion Beam Patterning
Download Full-text
Preparation of Polyacrylonitrile/Graphene Oxide Nanocomposite-Derived Carbon Microstructures by Ion Beam Patterning and Post-Pyrolysis
Science of Advanced Materials
◽
10.1166/sam.2016.2453
◽
2016
◽
Vol 8
(8)
◽
pp. 1714-1718
◽
Cited By ~ 1
Author(s):
Chang-Hee Jung
◽
Jin-Mook Jung
◽
In-Tae Hwang
◽
Chan-Hee Jung
◽
Jae-Hak Choi
◽
...
Keyword(s):
Graphene Oxide
◽
Ion Beam
◽
Ion Beam Patterning
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Ion Beam Patterning of High-Density STT-RAM Devices
IEEE Transactions on Magnetics
◽
10.1109/tmag.2016.2603921
◽
2017
◽
Vol 53
(2)
◽
pp. 1-4
◽
Cited By ~ 3
Author(s):
Vincent Ip
◽
Shuogang Huang
◽
Santino D. Carnevale
◽
Ivan L. Berry
◽
Katrina Rook
◽
...
Keyword(s):
Ion Beam
◽
High Density
◽
Ion Beam Patterning
Download Full-text
Critical issues in the focused ion beam patterning of nanometric hole matrixes on GaAs based semiconducting devices
Nanotechnology
◽
10.1088/0957-4484/17/6/036
◽
2006
◽
Vol 17
(6)
◽
pp. 1758-1762
◽
Cited By ~ 11
Author(s):
M Catalano
◽
A Taurino
◽
M Lomascolo
◽
A Schertel
◽
A Orchowski
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Critical Issues
◽
Ion Beam Patterning
Download Full-text
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