Effects of high-flux low-energy ion bombardment on the low-temperature growth morphology of TiN(001) epitaxial layers

2000 ◽  
Vol 61 (23) ◽  
pp. 16137-16143 ◽  
Author(s):  
Brian W. Karr ◽  
David G. Cahill ◽  
I. Petrov ◽  
J. E. Greene
Keyword(s):  
Low Temperature ◽  
Ion Bombardment ◽  
Low Energy ◽  
Epitaxial Layers ◽  
High Flux ◽  
Growth Morphology ◽  
Temperature Growth ◽  
Low Temperature Growth

Possibility of Low Temperature Growth of YBCO Thin Film by Low Energy Ion Assisted Deposition

1993 ◽  
pp. 1001-1004
Author(s):  
Masao Noma ◽  
Masami Nakasone ◽  
Soichi Ogawa ◽  
Tsutom Yotsuya ◽  
Yoshihiko Suzuki
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Low Energy ◽  
Ybco Thin Film ◽  
Temperature Growth ◽  
Low Temperature Growth

Ultra Low-Temperature Growth of High-Integrity Thin Gate Oxide Films by Low-Energy Ion-Assisted Oxidation

1995 ◽  
Vol 34 (Part 1, No. 2B) ◽  
pp. 900-902 ◽  
Author(s):  
Jinzo Watanabe ◽  
Yasuaki Kawai ◽  
Nobuhiro Konishi ◽  
Tadahiro Ohmi
Keyword(s):  
Low Temperature ◽  
Oxide Films ◽  
Gate Oxide ◽  
Low Energy ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
High Integrity ◽  
Thin Gate Oxide

Low temperature growth of GaAs1−yBiy epitaxial layers

2013 ◽  
Vol 380 ◽  
pp. 23-27 ◽  
Author(s):  
Kamran Forghani ◽  
Amita Anand ◽  
Luke J. Mawst ◽  
Thomas F. Kuech
Keyword(s):  
Low Temperature ◽  
Epitaxial Layers ◽  
Temperature Growth ◽  
Low Temperature Growth
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