High-flux ion irradiation with energy of ∼20eV affecting phase segregation and low-temperature growth of nc‐TiN∕a‐Si3N4 nanocomposite films
2007 ◽
Vol 25
(6)
◽
pp. 1524-1528
◽
Keyword(s):
2000 ◽
Vol 61
(23)
◽
pp. 16137-16143
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2013 ◽
Vol 110
(29)
◽
pp. 11757-11762
◽