Asymmetric extreme ultraviolet scattering from sputter-deposited multilayers

1999 ◽  
Vol 59 (20) ◽  
pp. 13273-13277 ◽  
Author(s):  
E. M. Gullikson ◽  
D. G. Stearns
2018 ◽  
Vol 26 (9) ◽  
pp. 11393 ◽  
Author(s):  
Giulia F. Mancini ◽  
Robert M. Karl ◽  
Elisabeth R. Shanblatt ◽  
Charles S. Bevis ◽  
Dennis F. Gardner ◽  
...  

2017 ◽  
Vol 96 (18) ◽  
Author(s):  
Antonio Caretta ◽  
Martina Dell'Angela ◽  
Yi-De Chuang ◽  
Alexandra M. Kalashnikova ◽  
Roman V. Pisarev ◽  
...  

2019 ◽  
Vol 99 (11) ◽  
Author(s):  
Marco Malvestuto ◽  
Antonio Caretta ◽  
Barbara Casarin ◽  
Roberta Ciprian ◽  
Martina Dell'Angela ◽  
...  

Author(s):  
A. F. Marshall ◽  
J. W. Steeds ◽  
D. Bouchet ◽  
S. L. Shinde ◽  
R. G. Walmsley

Convergent beam electron diffraction is a powerful technique for determining the crystal structure of a material in TEM. In this paper we have applied it to the study of the intermetallic phases in the Cu-rich end of the Cu-Zr system. These phases are highly ordered. Their composition and structure has been previously studied by microprobe and x-ray diffraction with sometimes conflicting results.The crystalline phases were obtained by annealing amorphous sputter-deposited Cu-Zr. Specimens were thinned for TEM by ion milling and observed in a Philips EM 400. Due to the large unit cells involved, a small convergence angle of diffraction was used; however, the three-dimensional lattice and symmetry information of convergent beam microdiffraction patterns is still present. The results are as follows:1) 21 at% Zr in Cu: annealed at 500°C for 5 hours. An intermetallic phase, Cu3.6Zr (21.7% Zr), space group P6/m has been proposed near this composition (2). The major phase of our annealed material was hexagonal with a point group determined as 6/m.


Author(s):  
G. Lucadamo ◽  
K. Barmak ◽  
C. Michaelsen

The subject of reactive phase formation in multilayer thin films of varying periodicity has stimulated much research over the past few years. Recent studies have sought to understand the reactions that occur during the annealing of Ni/Al multilayers. Dark field imaging from transmission electron microscopy (TEM) studies in conjunction with in situ x-ray diffraction measurements, and calorimetry experiments (isothermal and constant heating rate), have yielded new insights into the sequence of phases that occur during annealing and the evolution of their microstructure.In this paper we report on reactive phase formation in sputter-deposited lNi:3Al multilayer thin films with a periodicity A (the combined thickness of an aluminum and nickel layer) from 2.5 to 320 nm. A cross-sectional TEM micrograph of an as-deposited film with a periodicity of 10 nm is shown in figure 1. This image shows diffraction contrast from the Ni grains and occasionally from the Al grains in their respective layers.


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