Optical properties of free-electron metal films including electron surface scattering: Experiment

1979 ◽  
Vol 20 (10) ◽  
pp. 4076-4081 ◽  
Author(s):  
F. E. Hutchison ◽  
W. N. Hansen
1994 ◽  
Vol 337 ◽  
Author(s):  
M. Simard-Normandin ◽  
A. Naem ◽  
M. Saran

ABSTRACTSilicides are used widely in microelectronic fabrication, yet there are very little data available regarding their optical constants at most wavelengths, and specifically at those of interest to G-line and I-line lithography. We have studied extensively the optical properties of Ti, Co, as metal films and as silicide films formed at various temperatures, and of CVD (chemical vapour deposition) W. Using spectroscopic ellipsometry at two angles of incidence, we have calculated the complex index of refraction N = (n, k) of these films every 10nm at 68 wavelengths between 230 and 900nm. These data are necessary to model accurately the reflectivity of wafers to study the effects of various thermal and surface treatments on silicide growth and to set exposure times for lithography. They also allow the use of reflectivity vs X as a non-contact method to map film thicknesses across wafers within the patterned devices themselves.


2004 ◽  
Author(s):  
Yuelin Li ◽  
Samuel Krinsky ◽  
John W. Lewellen IV ◽  
Vadim Sajaev

1985 ◽  
Vol 4 (2) ◽  
pp. 154-158 ◽  
Author(s):  
J. Dryzek ◽  
A. Czapla

1981 ◽  
Vol 79 (2) ◽  
pp. 133-136 ◽  
Author(s):  
S. Santucci ◽  
P. Picozzi ◽  
L. Paoletti ◽  
F. Tangucci

Open Physics ◽  
2007 ◽  
Vol 5 (3) ◽  
Author(s):  
Roman Ďurikovič ◽  
Tomaš Ágošton

AbstractThe field of predictive rendering concerns itself with those methods of image synthesis which yield results that do not only look real, but are also radiometrically correct renditions of nature, i.e., which are accurate predictions of what a real scene would look like under given lighting conditions. A real coating consists of pigments, effect pigments, clear lacquer and glaze. A novel and unique combination of real parameters that are commonly measured in the industry and a theoretical reflectance model consisting of measurable parameters is required. Here, the authors design perception parameters and put them into well known surface reflection functions such as He and Torrance. The original contributions are the study of the sub-surface scattering of real paint and the prediction of its appearance in rendered images by the proposed model of light reflection beneath the paint surface.


2002 ◽  
Vol 80 (8) ◽  
pp. 1349-1351 ◽  
Author(s):  
T. J. Richardson ◽  
J. L. Slack ◽  
B. Farangis ◽  
M. D. Rubin

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