Optical properties of free-electron metal films including electron surface scattering: Theory

1979 ◽  
Vol 20 (10) ◽  
pp. 4069-4075 ◽  
Author(s):  
F. E. Hutchison ◽  
W. N. Hansen
Keyword(s):  
Optical Properties ◽  
Free Electron ◽  
Scattering Theory ◽  
Metal Films ◽  
Surface Scattering

Optical Properties of Metal Films and Their Silicides

1994 ◽  
Vol 337 ◽  
Author(s):  
M. Simard-Normandin ◽  
A. Naem ◽  
M. Saran
Keyword(s):  
Optical Properties ◽  
Optical Constants ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Metal Films ◽  
Index Of Refraction ◽  
Contact Method ◽  
Microelectronic Fabrication ◽  
Silicide Growth ◽  
Complex Index Of Refraction

ABSTRACTSilicides are used widely in microelectronic fabrication, yet there are very little data available regarding their optical constants at most wavelengths, and specifically at those of interest to G-line and I-line lithography. We have studied extensively the optical properties of Ti, Co, as metal films and as silicide films formed at various temperatures, and of CVD (chemical vapour deposition) W. Using spectroscopic ellipsometry at two angles of incidence, we have calculated the complex index of refraction N = (n, k) of these films every 10nm at 68 wavelengths between 230 and 900nm. These data are necessary to model accurately the reflectivity of wafers to study the effects of various thermal and surface treatments on silicide growth and to set exposure times for lithography. They also allow the use of reflectivity vs X as a non-contact method to map film thicknesses across wafers within the patterned devices themselves.

Optical properties of the output of a high-gain self-amplified free-electron laser

2004 ◽  
Author(s):  
Yuelin Li ◽  
Samuel Krinsky ◽  
John W. Lewellen IV ◽  
Vadim Sajaev
Keyword(s):  
Optical Properties ◽  
Free Electron ◽  
Free Electron Laser ◽  
High Gain

Free-electron parameters of sputtered noble metal films

1985 ◽  
Vol 4 (2) ◽  
pp. 154-158 ◽  
Author(s):  
J. Dryzek ◽  
A. Czapla
Keyword(s):  
Noble Metal ◽  
Free Electron ◽  
Metal Films

Optical properties of granular metal films: The Au/Ag system

1981 ◽  
Vol 79 (2) ◽  
pp. 133-136 ◽  
Author(s):  
S. Santucci ◽  
P. Picozzi ◽  
L. Paoletti ◽  
F. Tangucci
Keyword(s):  
Optical Properties ◽  
Metal Films
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