scholarly journals Mixed metal films with switchable optical properties

2002 ◽  
Vol 80 (8) ◽  
pp. 1349-1351 ◽  
Author(s):  
T. J. Richardson ◽  
J. L. Slack ◽  
B. Farangis ◽  
M. D. Rubin
Keyword(s):  
Optical Properties ◽  
Metal Films ◽  
Mixed Metal

Optical Properties of Metal Films and Their Silicides

1994 ◽  
Vol 337 ◽  
Author(s):  
M. Simard-Normandin ◽  
A. Naem ◽  
M. Saran
Keyword(s):  
Optical Properties ◽  
Optical Constants ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Metal Films ◽  
Index Of Refraction ◽  
Contact Method ◽  
Microelectronic Fabrication ◽  
Silicide Growth ◽  
Complex Index Of Refraction

ABSTRACTSilicides are used widely in microelectronic fabrication, yet there are very little data available regarding their optical constants at most wavelengths, and specifically at those of interest to G-line and I-line lithography. We have studied extensively the optical properties of Ti, Co, as metal films and as silicide films formed at various temperatures, and of CVD (chemical vapour deposition) W. Using spectroscopic ellipsometry at two angles of incidence, we have calculated the complex index of refraction N = (n, k) of these films every 10nm at 68 wavelengths between 230 and 900nm. These data are necessary to model accurately the reflectivity of wafers to study the effects of various thermal and surface treatments on silicide growth and to set exposure times for lithography. They also allow the use of reflectivity vs X as a non-contact method to map film thicknesses across wafers within the patterned devices themselves.

Optical properties of granular metal films: The Au/Ag system

1981 ◽  
Vol 79 (2) ◽  
pp. 133-136 ◽  
Author(s):  
S. Santucci ◽  
P. Picozzi ◽  
L. Paoletti ◽  
F. Tangucci
Keyword(s):  
Optical Properties ◽  
Metal Films

Thermal, structural, textural and optical properties of ZnO/ZnAl2O4 mixed metal oxide-based Zn/Al layered double hydroxide

2018 ◽  
Vol 5 (11) ◽  
pp. 116202 ◽  
Author(s):  
Ethar Yahya Salih ◽  
Mohd Faizul Mohd Sabri ◽  
Khaulah Sulaiman ◽  
Mohd Zobir Hussein ◽  
Suhana Mohd Said ◽  
...  
Keyword(s):  
Optical Properties ◽  
Metal Oxide ◽  
Layered Double Hydroxide ◽  
Mixed Metal Oxide ◽  
Mixed Metal ◽  
Double Hydroxide

ChemInform Abstract: Synthesis, Structures, Optical Properties and Electronic Structures of Two Mixed Metal Borates MBaB5O9(M: Na, K).

ChemInform ◽  
2014 ◽  
Vol 45 (6) ◽  
pp. no-no
Author(s):  
Hongwei Yu ◽  
Shilie Pan ◽  
Hongping Wu ◽  
Xin Su ◽  
Zhihua Yang
Keyword(s):  
Optical Properties ◽  
Electronic Structures ◽  
Mixed Metal
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