Influence of the Microstructure and of an Ion Beam Etching on the Domain Propagation in PZT Thin Films

2002 ◽  
Vol 50 (1) ◽  
pp. 231-240 ◽  
Author(s):  
B. Gautier ◽  
C. Soyer ◽  
E. Cattan ◽  
D. Remiens ◽  
J.-Ci. Labrune
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Etching ◽  
Pzt Thin Films

Reactive Ion Beam Etching of PZT Thin Films

2003 ◽  
Vol 288 (1) ◽  
pp. 253-263 ◽  
Author(s):  
C. Soyer ◽  
E. Cattan ◽  
D. Remiens
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Etching ◽  
Pzt Thin Films ◽  
Reactive Ion Beam Etching

Smoothing of polycrystalline Cu(In,Ga)(Se,S)2 thin films by low-energy ion-beam etching

1999 ◽  
Vol 17 (3) ◽  
pp. 793-798 ◽  
Author(s):  
F. Frost ◽  
G. Lippold ◽  
K. Otte ◽  
D. Hirsch ◽  
A. Schindler ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Etching

Electrical end-point detection during ion beam etching of thin films and multilayers

1995 ◽  
Vol 8 (8) ◽  
pp. 676-679 ◽  
Author(s):  
A Matthes ◽  
F Schmidl ◽  
K -U Barholz ◽  
F Elschner ◽  
H Schneidewind ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Etching ◽  
End Point ◽  
End Point Detection ◽  
Point Detection

Electro-optic Mach-Zehnder modulators with polycrystalline BaTiO3 thin films on MgO

2002 ◽  
Vol 748 ◽  
Author(s):  
A. Petraru ◽  
J. Schubert ◽  
M. Schmid ◽  
O. Trithaveesak ◽  
Ch. Buchal
Keyword(s):  
Thin Films ◽  
Growth Temperature ◽  
Ion Beam ◽  
Growth Conditions ◽  
Propagation Loss ◽  
Ion Beam Etching ◽  
Waveguide Propagation ◽  
Electro Optic ◽  
Ridge Waveguides ◽  
Waveguide Modulators

ABSTRACTThe optical and electro-optical properties of epitaxially grown thin films of ferroelectric BaTiO3 on MgO substrates have been established and high quality Mach-Zehnder waveguide modulators have been demonstrated. As a next step towards the integration of ferroelectric thin films on different substrates, we have modified the growth conditions by lowering the growth temperature to study polycrystalline, but still highly transparent BaTiO3 (BTO) films. Polycrystalline BTO on MgO substrates has been grown by pulsed laser deposition (PLD). The growth temperature was reduced from 800 °C to 400 °C at an oxygen pressure of 2×10-3 mbar. Although polycrystalline, the BTO is still birefringent with no= 2.32 and ne = 2.30. Ridge waveguides have been formed by ion beam etching. The estimated waveguide propagation loss is 4 dB/cm at 633 nm. Electro-optic Mach-Zehnder modulators have been realized. Using 3 mm long electrodes with a spacing of 10 μm, a Vπ voltage of 14 V was obtained at 633 nm wavelength. This is half of the observed effective electro-optic coefficient measured at epitaxial BTO films. At 1.5 μm wavelength similar results were observed.

A FED PROTOTYPE USING PATTERNED DLC THIN FILMS AS THE CATHODE

2002 ◽  
Vol 16 (06n07) ◽  
pp. 993-997 ◽  
Author(s):  
W. LI ◽  
T. FENG ◽  
D. S. MAO ◽  
X. WANG ◽  
X. H. LIU ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrophoretic Deposition ◽  
Ion Beam ◽  
Broad Band ◽  
Ion Beam Etching ◽  
Glass Slides ◽  
Bluish Green ◽  
Ito Glass ◽  
Titanium Thin Films ◽  
Arc Deposition

In our study, diamond-like-carbon (DLC) thin films were prepared by filtered arc deposition (FAD), which provided a way to deposit DLC thin films on large areas at room temperature. Glass slides coated 100nm chromium or titanium thin films were used as cathode substrates. Millions of rectangular holes with sizes of 5 × 5μm were made on the DLC films using a routine patterning process. Here a special reactive ion beam etching method was applied to etch the DLC films. The anodes of the devices were made by electrophoretic deposition. ZnO:Zn phosphor (P15) was employed, which has a broad band bluish green (centered at 490nm). Before electrophoretic deposition, the anode substrates (ITO glass slides) had been patterned into 50 anode electrodes. In order to improve the adherence of phosphor layers, the as-deposited screens were treated in Na2SiO3 solution for 24h to add additional binder. A kind of matrix-addressed diode FED prototype was designed and packaged. 50-100μm-thick glass slides were used as spacers and getters were applied to maintain the vacuum after the exhaustion. The applied DC voltage was ranged in 0-3000V and much higher current density was measured in the cathode-patterned prototypes than the unpatterned ones during the test. As a result, characters could be well displayed.

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