Damping and tracking control of nanopositioning stages with double delayed position feedback
2021 ◽
2001 ◽
Vol 148
(1)
◽
pp. 25-34
◽
Keyword(s):
Keyword(s):
2002 ◽
Vol 47
(5)
◽
pp. 841-847
◽
Keyword(s):
2009 ◽
Vol 17
(5)
◽
pp. 1208-1216
◽
Keyword(s):
Keyword(s):