Combinatorial synthesis of non-stoichiometric SiOx thin films via high-throughput reactive sputtering

2021 ◽  
Vol 129 (15) ◽  
pp. 155309
Author(s):  
Jihun Park ◽  
Sang Ho Shin ◽  
Jong-Seong Bae ◽  
Xiaohang Zhang ◽  
Ichiro Takeuchi ◽  
...  
Keyword(s):  
Thin Films ◽  
High Throughput ◽  
Reactive Sputtering ◽  
Combinatorial Synthesis

Thin film synthesis and properties of copper nitride, a metastable semiconductor

2014 ◽  
Vol 1 (4) ◽  
pp. 424-430 ◽  
Author(s):  
Christopher M. Caskey ◽  
Ryan M. Richards ◽  
David S. Ginley ◽  
Andriy Zakutayev
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Substrate Temperature ◽  
High Throughput ◽  
Reactive Sputtering ◽  
Combinatorial Approach ◽  
Copper Nitride ◽  
Substrate Distance ◽  
Film Synthesis

Copper nitride (Cu3N) thin films were grown by reactive sputtering using a high-throughput combinatorial approach with orthogonal gradients of substrate temperature and target–substrate distance.

scholarly journals Dependence of phase transitions on halide ratio in inorganic CsPb(BrxI1−x)3 perovskite thin films obtained from high-throughput experimentation

2020 ◽  
Vol 8 (43) ◽  
pp. 22626-22631
Author(s):  
H. Näsström ◽  
P. Becker ◽  
J. A. Márquez ◽  
O. Shargaieva ◽  
R. Mainz ◽  
...  
Keyword(s):  
Thin Films ◽  
Phase Diagram ◽  
Phase Transitions ◽  
High Throughput ◽  
Combinatorial Synthesis ◽  
X Ray ◽  
Heating And Cooling ◽  
High Throughput Experimentation ◽  
Cooling Phase

The heating and cooling phase diagram of CsPb(BrxI1−x)3 is determined by combinatorial synthesis and high throughput X-ray characterization.

Combinatorial synthesis and high-throughput evaluation of doped TiO 2 thin films for the development of photocatalysts

2000 ◽  
Author(s):  
Yuji Matsumoto ◽  
Makoto Murakami ◽  
Zhengwu Jin ◽  
Akira Nakayama ◽  
Tetsuo Yamaguchi ◽  
...  
Keyword(s):  
Thin Films ◽  
High Throughput ◽  
Combinatorial Synthesis

Preparation of CdS Thin Films by Reactive Sputtering Method

Shinku ◽  
1974 ◽  
Vol 17 (1) ◽  
pp. 19-22 ◽  
Author(s):  
Hiroharu HIRABAYASHI ◽  
Minoru NOGAMI
Keyword(s):  
Thin Films ◽  
Reactive Sputtering ◽  
Cds Thin Films

Substrate bias effects during R-F sputtering of Y-Ba-Cu-O films

1990 ◽  
Vol 5 (4) ◽  
pp. 677-679 ◽  
Author(s):  
A. J. Drehman ◽  
M. W. Dumais
Keyword(s):  
Thin Films ◽  
Strontium Titanate ◽  
Reactive Sputtering ◽  
Negative Bias ◽  
Superconducting Thin Films ◽  
Substrate Bias ◽  
Composition Control ◽  
Zero Resistance

Y-Ba-Cu-O films were made by R-F diode sputtering using a single oxide target. It was found that if a small negative bias is applied to the substrate, the etching associated with reactive sputtering is significantly reduced. This results in better composition control and uniformity, which are quite important for the formation of superconducting thin films. Films deposited on strontium titanate, when annealed in oxygen, become superconducting with zero resistance at 89 K.

Evaluation of ion conductivity of ZrO2 thin films prepared by reactive sputtering in O2, H2O, and H2O+H2O2 mixed gas

2012 ◽  
Vol 520 (16) ◽  
pp. 5137-5140 ◽  
Author(s):  
Ning Li ◽  
Yoshio Abe ◽  
Midori Kawamura ◽  
Kyung Ho Kim ◽  
Tsutomu Suzuki
Keyword(s):  
Thin Films ◽  
Reactive Sputtering ◽  
Ion Conductivity ◽  
Mixed Gas

scholarly journals High Throughput Screening of Valganciclovir in Acidic Microenvironments of Polyester Thin Films

Materials ◽  
2015 ◽  
Vol 8 (4) ◽  
pp. 1714-1728 ◽  
Author(s):  
Teilo Schaller ◽  
Tobias Wenner ◽  
Rupesh Agrawal ◽  
Stephen Teoh ◽  
Li Phua ◽  
...  
Keyword(s):  
Thin Films ◽  
High Throughput ◽  
High Throughput Screening
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