scholarly journals Comment on “A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma” [Phys. Plasmas 22, 123504 (2015)]

2021 ◽  
Vol 28 (6) ◽  
pp. 064701
Author(s):  
Z. F. Ding
Keyword(s):  
Plasma Phys ◽  
Discharge Characteristic ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma

2015 ◽  
Vol 22 (12) ◽  
pp. 123504
Author(s):  
Young-Cheol Kim ◽  
Hyun-Jun Kim ◽  
Hyo-Chang Lee ◽  
Chin-Wook Chung
Keyword(s):  
Discharge Characteristic ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

2000 ◽  
Vol 77 (4) ◽  
pp. 489-491 ◽  
Author(s):  
T. Kitajima ◽  
Y. Takeo ◽  
Z. Lj. Petrović ◽  
T. Makabe
Keyword(s):  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

2016 ◽  
Vol 18 (2) ◽  
pp. 143-146
Author(s):  
Hongyu Wang ◽  
Wei Jiang ◽  
Peng Sun ◽  
Shuangyun Zhao ◽  
Yang Li
Keyword(s):  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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