Quality factor boosting of bulk acoustic wave resonators based on a two dimensional array of high-Q resonant tanks

Gayathri Pillai; Sheng-Shian Li

doi:10.1063/5.0007418

Quality factor boosting of bulk acoustic wave resonators based on a two dimensional array of high-Q resonant tanks

Applied Physics Letters ◽

10.1063/5.0007418 ◽

2020 ◽

Vol 116 (16) ◽

pp. 163502

Author(s):

Gayathri Pillai ◽

Sheng-Shian Li

Keyword(s):

Acoustic Wave ◽

Quality Factor ◽

Bulk Acoustic Wave ◽

Two Dimensional ◽

Dimensional Array ◽

High Q ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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High-Q AlN/SiO2 symmetric composite thin film bulk acoustic wave resonators

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.953 ◽

2008 ◽

Vol 55 (11) ◽

pp. 2463-2468 ◽

Cited By ~ 26

Author(s):

A. Artieda ◽

P. Muralt

Keyword(s):

Thin Film ◽

Acoustic Wave ◽

Composite Thin Film ◽

Bulk Acoustic Wave ◽

High Q ◽

Film Bulk ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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Extremely high Q-factor mechanical modes in quartz bulk acoustic wave resonators at millikelvin temperature

10.1063/1.4903104 ◽

2014 ◽

Cited By ~ 1

Author(s):

M. Goryachev ◽

D. L. Creedon ◽

E. N. Ivanov ◽

S. Galliou ◽

R. Bourquin ◽

...

Keyword(s):

Acoustic Wave ◽

Bulk Acoustic Wave ◽

Q Factor ◽

High Q ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators ◽

Millikelvin Temperature

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Influence of electrode configurations on the quality factor and piezoelectric coupling constant of solidly mounted bulk acoustic wave resonators

Journal of Applied Physics ◽

10.1063/1.1505977 ◽

2002 ◽

Vol 92 (7) ◽

pp. 4062-4069 ◽

Cited By ~ 66

Author(s):

Si-Hyung Lee ◽

Ki Hyun Yoon ◽

Jeon-Kook Lee

Keyword(s):

Acoustic Wave ◽

Quality Factor ◽

Bulk Acoustic Wave ◽

Coupling Constant ◽

Piezoelectric Coupling ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2020.3022765 ◽

2020 ◽

Vol 29 (6) ◽

pp. 1473-1482

Author(s):

Jeremy Yang ◽

Benoit Hamelin ◽

Farrokh Ayazi

Keyword(s):

Acoustic Wave ◽

Elastic Anisotropy ◽

Bulk Acoustic Wave ◽

High Q ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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GHz High-$Q$ Lateral Overmoded Bulk Acoustic-Wave Resonators Using Epitaxial SiC Thin Film

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2011.2179017 ◽

2012 ◽

Vol 21 (2) ◽

pp. 253-255 ◽

Cited By ~ 20

Author(s):

Songbin Gong ◽

Nai-Kuei Kuo ◽

Gianluca Piazza

Keyword(s):

Thin Film ◽

Acoustic Wave ◽

Bulk Acoustic Wave ◽

High Q ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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High-Q UHF and SHF Bulk Acoustic Wave Resonators with Ten-Nanometer Hf0.5Zr0.5O2 Ferroelectric Transducer

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) ◽

10.1109/transducers.2019.8808308 ◽

2019 ◽

Cited By ~ 3

Author(s):

Mayur Ghatge ◽

Glen Walters ◽

Toshikazu Nishida ◽

Roozbeh Tabrizian

Keyword(s):

Acoustic Wave ◽

Bulk Acoustic Wave ◽

High Q ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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Two-dimensional Legendre polynomial modeling of composite bulk acoustic wave resonators

Journal of Applied Physics ◽

10.1063/1.3504611 ◽

2010 ◽

Vol 108 (10) ◽

pp. 104904 ◽

Cited By ~ 6

Author(s):

A. Raherison ◽

J. E. Lefebvre ◽

F. E. Ratolojanahary ◽

L. Elmaimouni ◽

T. Gryba

Keyword(s):

Acoustic Wave ◽

Legendre Polynomial ◽

Bulk Acoustic Wave ◽

Two Dimensional ◽

Polynomial Modeling ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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Self-Heating and Quality Factor: Thermal Challenges in Aluminum Scandium Nitride Bulk Acoustic Wave Resonators

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) ◽

10.1109/transducers50396.2021.9495613 ◽

2021 ◽

Author(s):

Yue Zheng ◽

Mingyo Park ◽

Azadeh Ansari ◽

Chao Yuan ◽

Samuel Graham

Keyword(s):

Acoustic Wave ◽

Quality Factor ◽

Bulk Acoustic Wave ◽

Scandium Nitride ◽

Self Heating ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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Gallium arsenide bulk acoustic wave resonators fabricated using sol-gel technology

Electronics Letters ◽

10.1049/el:19930419 ◽

1993 ◽

Vol 29 (7) ◽

pp. 626 ◽

Cited By ~ 4

Author(s):

Z. Awang ◽

R.E. Miles

Keyword(s):

Gallium Arsenide ◽

Acoustic Wave ◽

Sol Gel ◽

Bulk Acoustic Wave ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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All‐Epitaxial Bulk Acoustic Wave Resonators

physica status solidi (a) ◽

10.1002/pssa.201900786 ◽

2020 ◽

Vol 217 (7) ◽

pp. 1900786

Author(s):

Jeffrey Miller ◽

John Wright ◽

Huili Grace Xing ◽

Debdeep Jena

Keyword(s):

Acoustic Wave ◽

Bulk Acoustic Wave ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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