Optical emission spectroscopy of helium helps deduce plasma electron density and temperature

Scilight ◽  
2020 ◽  
Vol 2020 (9) ◽  
pp. 091105
Author(s):  
Adam Liebendorfer
Keyword(s):  
Electron Density ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Electron ◽  
Electron Density And Temperature ◽  
Plasma Electron Density

scholarly journals Optical emission spectroscopy for studying the exploding copper wire plasma parameters in distilled water

2018 ◽  
Vol 15 (35) ◽  
pp. 142-147
Author(s):  
Hammad R. Humud
Keyword(s):  
Electron Density ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Copper Wire ◽  
Optical Emission ◽  
Plasma Electron ◽  
Distilled Water ◽  
Stark Broadening ◽  
Plasma Parameters ◽  
Nanoparticles Concentration

This work aims to study the exploding copper wire plasma parameters by optical emission spectroscopy. The emission spectra of the copper plasma have been recorded and analyzed The plasma electron temperature (Te), was calculated by Boltzmann plot, and the electron density (ne) calculated by using Stark broadening method for different copper wire diameter (0.18, 0.24 and 0.3 mm) and currentof 75A in distilled water. The hydrogen (Hα line) 656.279 nm was used to calculate the electron density for different wire diameters by Stark broadening. It was found that the electron density ne decrease from 22.4×1016 cm-3 to 17×1016 cm-3 with increasing wire diameter from 0.18 mm to 0.3 mm while the electron temperatures increase from 0.741 to 0.897 eV for the same wire diameters. The optical emission spectrum (OES) emitted from the plasma have Hα line, small peak at 590 nm corresponding to sodium and others peaks belong to Cu I. The relationship between the plasma electron temperature, emission line intensity and number density with the formed copper nanoparticles size and concentration were studied. It was found that the nanoparticles concentration increase with emission line intensity while its size decrease. It can be conclude the existence of a controlled relationship between the plasma parameters and the formed nanoparticles concentration and size.

Spatiotemporal optical emission spectroscopy to estimate electron density and temperature of plasmas in solution

2020 ◽  
Vol 53 (23) ◽  
pp. 235202 ◽  
Author(s):  
Kenichi Inoue ◽  
Shion Takahashi ◽  
Noritaka Sakakibara ◽  
Susumu Toko ◽  
Tsuyohito Ito ◽  
...  
Keyword(s):  
Electron Density ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Electron Density And Temperature

scholarly journals Machine Learning Prediction of Electron Density and Temperature from Optical Emission Spectroscopy in Nitrogen Plasma

Coatings ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1221
Author(s):  
Jun-Hyoung Park ◽  
Ji-Ho Cho ◽  
Jung-Sik Yoon ◽  
Jung-Ho Song
Keyword(s):  
Machine Learning ◽  
Electron Temperature ◽  
Real Time ◽  
Electron Density ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Parameters ◽  
Plasma Nitridation

We present a non-invasive approach for monitoring plasma parameters such as the electron temperature and density inside a radio-frequency (RF) plasma nitridation device using optical emission spectroscopy (OES) in conjunction with multivariate data analysis. Instead of relying on a theoretical model of the plasma emission to extract plasma parameters from the OES, an empirical correlation was established on the basis of simultaneous OES and other diagnostics. Additionally, we developed a machine learning (ML)-based virtual metrology model for real-time Te and ne monitoring in plasma nitridation processes using an in situ OES sensor. The results showed that the prediction accuracy of electron density was 97% and that of electron temperature was 90%. This method is especially useful in plasma processing because it provides in-situ and real-time analysis without disturbing the plasma or interfering with the process.

scholarly journals PARAMETERS OF HYDROGEN PLASMA STREAMS IN QSPA-M AND THEIR DEPENDENCE ON EXTERNAL MAGNETIC FIELD

2021 ◽  
pp. 61-64
Author(s):  
M.S. Ladygina ◽  
Yu.V. Petrov ◽  
D.V. Yeliseev ◽  
V.A. Makhlai ◽  
N.V. Kulik ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Electron Density ◽  
Hydrogen Plasma ◽  
Experimental Studies ◽  
Optical Emission ◽  
Plasma Electron ◽  
Plasma Stream ◽  
Visible Radiation ◽  
Order Of Magnitude ◽  
Plasma Electron Density

Present experimental studies are aimed at analysis of hydrogen plasma stream parameters in various working regimes of QSPA-M operation. Temporal distributions of plasma electron density are reconstructed with optical emission spectroscopy. The magnetic field influence on plasma streams parameters is analyzed. It is shown that in regimes with additional magnetic field the plasma electron density increases by an order of magnitude in comparison with a density value without magnetic field. The plasma velocity and energy density parameters as well as their temporal behaviors were estimatedin different operating regimes of QSPA-M facility. Features of plasma visible radiation were analyzed. This information is important for QSPA-M applications in experiments on interaction of powerful plasma streams with material surfaces.

Gas temperature and electron density profiles in an argon dc microdischarge measured by optical emission spectroscopy

2010 ◽  
Vol 107 (5) ◽  
pp. 053305 ◽  
Author(s):  
Sergey G. Belostotskiy ◽  
Tola Ouk ◽  
Vincent M. Donnelly ◽  
Demetre J. Economou ◽  
Nader Sadeghi
Keyword(s):  
Electron Density ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Gas Temperature ◽  
Density Profiles ◽  
Electron Density Profiles
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