Optical emission spectroscopy for simultaneous measurement of plasma electron density and temperature in a low-pressure microwave induced plasma
2019 ◽
Vol 28
(6)
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pp. 065012
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Keyword(s):
2022 ◽
2020 ◽
Vol 53
(23)
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pp. 235202
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2004 ◽
Vol 37
(19)
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pp. R217-R236
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1986 ◽
Vol 41
(7)
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pp. 669-676
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Keyword(s):