Thermal equilibrium process in undoped hydrogenated amorphous silicon and silicon‐carbon alloy films

Xixiang Xu; Akiharu Morimoto; Minoru Kumeda; Tatsuo Shimizu

doi:10.1063/1.99384

Thermal equilibrium process in undoped hydrogenated amorphous silicon and silicon‐carbon alloy films

Applied Physics Letters ◽

10.1063/1.99384 ◽

1988 ◽

Vol 52 (8) ◽

pp. 622-624 ◽

Cited By ~ 21

Author(s):

Xixiang Xu ◽

Akiharu Morimoto ◽

Minoru Kumeda ◽

Tatsuo Shimizu

Keyword(s):

Amorphous Silicon ◽

Thermal Equilibrium ◽

Hydrogenated Amorphous Silicon ◽

Alloy Films ◽

Silicon Carbon ◽

Equilibrium Process ◽

Hydrogenated Amorphous

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Influence of sputtering pressure on the properties of hydrogenated amorphous‐silicon carbon alloy films prepared by magnetron sputtering of silicon in methane‐argon gas mixtures

Journal of Applied Physics ◽

10.1063/1.336995 ◽

1986 ◽

Vol 59 (7) ◽

pp. 2498-2502 ◽

Cited By ~ 16

Author(s):

Nobuo Saito

Keyword(s):

Magnetron Sputtering ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Gas Mixtures ◽

Argon Gas ◽

Alloy Films ◽

Silicon Carbon ◽

Sputtering Pressure ◽

Hydrogenated Amorphous

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Defects in hydrogenated amorphous silicon‐carbon alloy films prepared by glow discharge decomposition and sputtering

Journal of Applied Physics ◽

10.1063/1.329879 ◽

1982 ◽

Vol 53 (11) ◽

pp. 7299-7305 ◽

Cited By ~ 132

Author(s):

A. Morimoto ◽

T. Miura ◽

M. Kumeda ◽

T. Shimizu

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Alloy Films ◽

Silicon Carbon ◽

Hydrogenated Amorphous

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A direct measurement of thermal equilibrium defects in hydrogenated amorphous silicon-nitrogen alloy films

phys stat sol (a) ◽

10.1002/pssa.2211180149 ◽

1990 ◽

Vol 118 (1) ◽

pp. K39-K41

Author(s):

Deyan He ◽

Fangqing Zhang ◽

Guanghua Chen

Keyword(s):

Amorphous Silicon ◽

Direct Measurement ◽

Thermal Equilibrium ◽

Hydrogenated Amorphous Silicon ◽

Alloy Films ◽

Nitrogen Alloy ◽

Equilibrium Defects ◽

Hydrogenated Amorphous

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The effect of carbon on the density of states of hydrogenated amorphous silicon-carbon alloy films prepared from silane and propane

Journal of Non-Crystalline Solids ◽

10.1016/0022-3093(89)90022-7 ◽

1989 ◽

Vol 113 (2-3) ◽

pp. 282-286 ◽

Cited By ~ 1

Author(s):

K. Ibrahim ◽

J.I.B. Wilson ◽

A. Qayyum ◽

A.E. Henderson ◽

A.G. Fitzgerald

Keyword(s):

Amorphous Silicon ◽

Density Of States ◽

Hydrogenated Amorphous Silicon ◽

Alloy Films ◽

Silicon Carbon ◽

Hydrogenated Amorphous

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Thermal modification of wide-bandgap hydrogenated amorphous silicon-carbon alloy films grown by plasma-enhanced chemical vapour deposition from C2H2+SiH4 mixtures

Philosophical Magazine B ◽

10.1080/13642819708202333 ◽

1997 ◽

Vol 75 (4) ◽

pp. 485-496 ◽

Cited By ~ 6

Author(s):

Yichun Liu ◽

F. Giorgis ◽

C. F. Pirri

Keyword(s):

Amorphous Silicon ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapour ◽

Wide Bandgap ◽

Thermal Modification ◽

Alloy Films ◽

Silicon Carbon ◽

Hydrogenated Amorphous

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Thermally induced metastable defects in hydrogenated amorphous silicon and silicon-carbon alloy films

Physical Review B ◽

10.1103/physrevb.38.8371 ◽

1988 ◽

Vol 38 (12) ◽

pp. 8371-8376 ◽

Cited By ~ 34

Author(s):

Xixiang Xu ◽

Akihisa Okumura ◽

Akiharu Morimoto ◽

Minoru Kumeda ◽

Tatsuo Shimizu

Keyword(s):

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Alloy Films ◽

Thermally Induced ◽

Silicon Carbon ◽

Hydrogenated Amorphous

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Quantum well model and variation of the optical band gap in hydrogenated amorphous silicon carbon alloy films

Solid State Communications ◽

10.1016/s0038-1098(01)00161-2 ◽

2001 ◽

Vol 118 (10) ◽

pp. 535-539 ◽

Cited By ~ 6

Author(s):

D.K Basa

Keyword(s):

Quantum Well ◽

Amorphous Silicon ◽

Band Gap ◽

Optical Band Gap ◽

Hydrogenated Amorphous Silicon ◽

Alloy Films ◽

Silicon Carbon ◽

Well Model ◽

Hydrogenated Amorphous

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Electron spin resonance of hydrogenated amorphous silicon-carbon alloy films prepared by magnetron sputtering

Philosophical Magazine Letters ◽

10.1080/09500838708203764 ◽

1987 ◽

Vol 56 (4) ◽

pp. 161-163 ◽

Cited By ~ 1

Author(s):

Takato Nakamura ◽

Nobuo Saito ◽

Yoshiko Suzuki ◽

Yoichiro Nakanishi ◽

Goro Shimaoka

Keyword(s):

Electron Spin Resonance ◽

Magnetron Sputtering ◽

Amorphous Silicon ◽

Electron Spin ◽

Hydrogenated Amorphous Silicon ◽

Alloy Films ◽

Silicon Carbon ◽

Spin Resonance ◽

Hydrogenated Amorphous

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Thermal equilibrium process in hydrogenated amorphous silicon npnp doping-modulated superlattices

Journal of Non-Crystalline Solids ◽

10.1016/0022-3093(89)90684-4 ◽

1989 ◽

Vol 114 ◽

pp. 666-668 ◽

Cited By ~ 3

Author(s):

Yoon-Ho Song ◽

Byueng-Su Yoo ◽

Choochon Lee ◽

Jin Jang

Keyword(s):

Amorphous Silicon ◽

Thermal Equilibrium ◽

Hydrogenated Amorphous Silicon ◽

Equilibrium Process ◽

Hydrogenated Amorphous

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Phosphorus Doping and Photoinduced Changes in Hydrogenated Amorphous Silicon-Carbon Alloy Films

Japanese Journal of Applied Physics ◽

10.1143/jjap.28.1776 ◽

1989 ◽

Vol 28 (Part 1, No. 10) ◽

pp. 1776-1779 ◽

Cited By ~ 7

Author(s):

N. Basu ◽

Gautam Ganguly ◽

Swati Ray ◽

A. K. Barua

Keyword(s):

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Phosphorus Doping ◽

Alloy Films ◽

Silicon Carbon ◽

Photoinduced Changes ◽

Hydrogenated Amorphous

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