Defects in hydrogenated amorphous silicon‐carbon alloy films prepared by glow discharge decomposition and sputtering

1982 ◽  
Vol 53 (11) ◽  
pp. 7299-7305 ◽  
Author(s):  
A. Morimoto ◽  
T. Miura ◽  
M. Kumeda ◽  
T. Shimizu
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Alloy Films ◽  
Silicon Carbon ◽  
Hydrogenated Amorphous

Thermally induced metastable defects in hydrogenated amorphous silicon and silicon-carbon alloy films

1988 ◽  
Vol 38 (12) ◽  
pp. 8371-8376 ◽  
Author(s):  
Xixiang Xu ◽  
Akihisa Okumura ◽  
Akiharu Morimoto ◽  
Minoru Kumeda ◽  
Tatsuo Shimizu
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Alloy Films ◽  
Thermally Induced ◽  
Silicon Carbon ◽  
Hydrogenated Amorphous

Evidence for graphitic‐type bonding in glow discharge hydrogenated amorphous silicon carbon alloys

1985 ◽  
Vol 57 (8) ◽  
pp. 2717-2720 ◽  
Author(s):  
A. H. Mahan ◽  
B. von Roedern ◽  
D. L. Williamson ◽  
A. Madan
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Carbon ◽  
Hydrogenated Amorphous
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