Correlation between the elastic and structural properties of thin‐film tungsten silicide layers from surface acoustic wave analysis

1987 ◽  
Vol 51 (20) ◽  
pp. 1591-1593 ◽  
Author(s):  
G. M. Crean ◽  
A. Golanski ◽  
J. C. Oberlin ◽  
A. Perio
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Structural Properties ◽  
Surface Acoustic Wave ◽  
Wave Analysis ◽  
Tungsten Silicide

Experimental and theoretical surface acoustic wave analysis of thin‐film lipid multilayers

1992 ◽  
Vol 61 (4) ◽  
pp. 402-404 ◽  
Author(s):  
Bruno Bianco ◽  
Andrea Cambiaso ◽  
Rita Paradiso ◽  
Tullio Tommasi
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wave Analysis

Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors

2008 ◽  
Author(s):  
A. Kabulski ◽  
V. R. Pagán ◽  
D. Cortes ◽  
R. Burda ◽  
O. M. Mukdadi ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Sensors ◽  
Wave Sensors

scholarly journals Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation

Micromachines ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 10
Author(s):  
Alexander Kukaev ◽  
Dmitry Lukyanov ◽  
Denis Mikhailenko ◽  
Daniil Safronov ◽  
Sergey Shevchenko ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Inertial Sensors ◽  
Surface Acoustic Waves ◽  
Sensing Element ◽  
Small Series ◽  
Evaporation Technique ◽  
Photolithography Process

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

Longitudinal-Type Leaky Surface Acoustic Wave on LiNbO3with High-Velocity Thin Film

2013 ◽  
Vol 52 (7S) ◽  
pp. 07HD02 ◽  
Author(s):  
Fumiya Matsukura ◽  
Masato Uematsu ◽  
Keiko Hosaka ◽  
Shoji Kakio
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Velocity
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