Structural properties and frequency response of AlN thin film surface acoustic wave device
2018 ◽
Vol 284
◽
pp. 012028
◽
Keyword(s):
2017 ◽
Vol 56
(10S)
◽
pp. 10PF03
◽
Keyword(s):
2012 ◽
Vol 258
(14)
◽
pp. 5424-5428
◽
Keyword(s):
Keyword(s):
2007 ◽
Vol 46
(7B)
◽
pp. 4754-4759
◽
Keyword(s):