Phosphorus doping for hydrogenated amorphous silicon films by a low‐energy ion doping technique

1987 ◽  
Vol 51 (4) ◽  
pp. 253-255 ◽  
Author(s):  
A. Yoshida ◽  
K. Setsune ◽  
T. Hirao
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Low Energy ◽  
Silicon Films ◽  
Phosphorus Doping ◽  
Ion Doping ◽  
Doping Technique ◽  
Hydrogenated Amorphous

Photoconductivity and trapping parameters in hydrogenated amorphous silicon films

1983 ◽  
Vol 9 (1-3) ◽  
pp. 295-300
Author(s):  
S. Galassini ◽  
G. Micocci ◽  
C. Pennetta ◽  
A. Rizzo ◽  
A. Tepore ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Hydrogenated Amorphous

Substrate temperature effect on the stability of hydrogenated amorphous silicon films deposited at high rates

1995 ◽  
Vol 78 (1) ◽  
pp. 317-320 ◽  
Author(s):  
J. P. Kleider ◽  
C. Longeaud ◽  
M. Barranco‐Diaz ◽  
P. Morin ◽  
P. Roca i Cabarrocas
Keyword(s):  
Substrate Temperature ◽  
Temperature Effect ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
The Stability ◽  
Hydrogenated Amorphous

Interaction of hydrogenated amorphous silicon films with transparent conductive films

1983 ◽  
Vol 54 (6) ◽  
pp. 3269-3271 ◽  
Author(s):  
M. Kitagawa ◽  
K. Mori ◽  
S. Ishihara ◽  
M. Ohno ◽  
T. Hirao ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Transparent Conductive Films ◽  
Conductive Films ◽  
Hydrogenated Amorphous
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