Redistribution of arsenic in silicon during high pressure thermal oxidation

1987 ◽  
Vol 50 (11) ◽  
pp. 688-690 ◽  
Author(s):  
Seong S. Choi ◽  
M. Z. Numan ◽  
W. K. Chu ◽  
J. K. Srivastava ◽  
E. A. Irene
1987 ◽  
Vol 23 (24) ◽  
pp. 1329 ◽  
Author(s):  
K.N. Bhat ◽  
N. Basu

1988 ◽  
Vol 63 (2) ◽  
pp. 506-509 ◽  
Author(s):  
R. G. Gann ◽  
K. M. Geib ◽  
C. W. Wilmsen ◽  
J. Costello ◽  
G. Hrychowain ◽  
...  

2013 ◽  
Vol 2 (4) ◽  
pp. Q17-Q20 ◽  
Author(s):  
W. F. Liu ◽  
J. M. Bian ◽  
Z. C. Zhao ◽  
Y. L. Luo ◽  
Z. Yuan ◽  
...  

2018 ◽  
Author(s):  
X. Wang ◽  
T. Nishimura ◽  
T. Yajima ◽  
A. Toriumi

1987 ◽  
Vol 23 (1) ◽  
pp. 8-10 ◽  
Author(s):  
E.E. Crisman ◽  
J.I. Lee ◽  
P.J. Stiles ◽  
O.J. Gregory

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