Ion implant monitoring with thermal wave technology

W. Lee Smith; Allan Rosencwaig; David L. Willenborg

doi:10.1063/1.96079

Ion implant monitoring with thermal wave technology

Applied Physics Letters ◽

10.1063/1.96079 ◽

1985 ◽

Vol 47 (6) ◽

pp. 584-586 ◽

Cited By ~ 135

Author(s):

W. Lee Smith ◽

Allan Rosencwaig ◽

David L. Willenborg

Keyword(s):

Thermal Wave ◽

Wave Technology

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Nondestructive analysis of ultrashallow junctions using thermal wave technology

Review of Scientific Instruments ◽

10.1063/1.1515890 ◽

2003 ◽

Vol 74 (1) ◽

pp. 586-588 ◽

Cited By ~ 8

Author(s):

Lena Nicolaides ◽

Alex Salnick ◽

Jon Opsal

Keyword(s):

Thermal Wave ◽

Nondestructive Analysis ◽

Wave Technology ◽

Ultrashallow Junctions

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Detection and Evaluation of Corrosion Damage under Coating by Infrared Thermal Wave Technology

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.190-191.447 ◽

2012 ◽

Vol 190-191 ◽

pp. 447-451

Author(s):

Guo Feng Jin ◽

Zhi Yong Huang ◽

Wei Zhang ◽

Zheng Wei Yang ◽

Lu Zhu

Keyword(s):

Surface Temperature ◽

Thermal Wave ◽

Damage Identification ◽

Corrosion Damage ◽

Temperature History ◽

Test Results ◽

Wave Technology ◽

History Of ◽

Infrared Thermal Images ◽

Images Processing

Aims at the safety problems caused by corrosion under coating for it can not easily be observed, specimen of corrosion damage under coating was made for the research of detection by applying infrared thermal wave technology. The surface temperature distribution infrared thermal images were captured, also the surface temperature history of corrosion area, non-corrosion area and their difference. Analysis of test results show that the infrared thermal wave technology is an effective tool in detecting corrosion damage under coating, there has a fine detection time used to estimate the coating thickness, and the position and sizes of defects can be found out directly by the hot spots in the infrared images. The damages can be quantitatively recognized by images processing, but surface uniformity of the specimen has great impact on the damage identification.

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