Influence of substrate temperature on the formation of buried oxide and surface crystallinity during high dose oxygen implantation into Si

1984 ◽  
Vol 45 (10) ◽  
pp. 1081-1083 ◽  
Author(s):  
O. W. Holland ◽  
T. P. Sjoreen ◽  
D. Fathy ◽  
J. Narayan
Keyword(s):  
Substrate Temperature ◽  
High Dose ◽  
Oxygen Implantation ◽  
Buried Oxide ◽  
Influence Of Substrate

C-V and C-t analysis of buried oxide layers formed by high-dose oxygen implantation

1989 ◽  
Vol 18 (3) ◽  
pp. 385-389 ◽  
Author(s):  
F. T. Brady ◽  
S. S. Li ◽  
W. A. Krull
Keyword(s):  
High Dose ◽  
Oxide Layers ◽  
Oxygen Implantation ◽  
Buried Oxide

Silicon-on-insulator structures using high dose oxygen implantation to form buried oxide films

1983 ◽  
Vol 14 (6) ◽  
pp. 88-107 ◽  
Author(s):  
K. Das ◽  
G. Shorthouse ◽  
J. Butcher ◽  
K.V. Anand
Keyword(s):  
Oxide Films ◽  
Silicon On Insulator ◽  
High Dose ◽  
Oxygen Implantation ◽  
Buried Oxide

Influence of substrate temperature on nitridation of (001) GaAs using RF-radical source

2009 ◽  
Vol 311 (10) ◽  
pp. 2992-2995 ◽  
Author(s):  
Shigeya Naritsuka ◽  
Midori Mori ◽  
Yoshitaka Takeuchi ◽  
Takahiro Maruyama
Keyword(s):  
Substrate Temperature ◽  
Influence Of Substrate

An investigation of as‐implanted material formed by high dose 40 keV oxygen implantation into silicon at 550 °C

1993 ◽  
Vol 74 (1) ◽  
pp. 82-85 ◽  
Author(s):  
Y. Li ◽  
J. A. Kilner ◽  
R. J. Chater ◽  
A. Nejim ◽  
P. L. F. Hemment ◽  
...  
Keyword(s):  
High Dose ◽  
Oxygen Implantation

Influence of Substrate Temperature in the Morphology and Microstructure of YSZ Films Obtained on LSM Porous Substrate via Spray Pyrolysis

2012 ◽  
Vol 727-728 ◽  
pp. 691-696 ◽  
Author(s):  
Tiago Falcade ◽  
Giselle Barbosa de Oliveira ◽  
Diego Pereira Tarragó ◽  
Vânia Caldas de Sousa ◽  
Célia de Fraga Malfatti
Keyword(s):  
Substrate Temperature ◽  
Spray Pyrolysis ◽  
Spray Pyrolysis Technique ◽  
Precursor Solution ◽  
Cubic Phase ◽  
Porous Substrate ◽  
X Ray Diffraction ◽  
Heat Treated ◽  
Ft Ir ◽  
Influence Of Substrate

Many studies have been reported in the literature related to YSZ films deposited on dense substrate or applied directly on the SOFC anode. However, there are not a lot of studies about the YSZ deposition on the cathode. The present work aims to obtain yttria-stabilized zirconia (YSZ), using the spray pyrolysis technique, for their application as electrolyte in solid oxide fuel cells (SOFC). The films were obtained from a precursor solution containing zirconium and yttrium salts, dissolved in ethanol and propylene glycol (1:1), this solution was sprayed onto a heated LSM porous substrate. The substrate temperature was varied in order to obtain dense and homogeneous films. After deposition, the films were heat treated, aiming to crystallize and stabilize the zirconia cubic phase. The films were characterized by Scanning Electron Microscopy (SEM), thermal analysis, X-ray diffraction and Fourier transform Infrared Spectroscopy (FT-IR).

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