Disappearance of topographical contrast in the backscattered electron image in scanning electron microscopy

1983 ◽  
Vol 42 (6) ◽  
pp. 533-534 ◽  
Author(s):  
T. Ikuta
2017 ◽  
Vol 23 (6) ◽  
pp. 1082-1090 ◽  
Author(s):  
Dai Tang ◽  
Mauro E. Ferreira ◽  
Petrus C. Pistorius

AbstractAutomated inclusion microanalysis in steel samples by computer-based scanning electron microscopy provides rapid quantitative information on micro-inclusion distribution, composition, size distribution, morphology, and concentration. Performing the analysis at a lower accelerating voltage (10 kV), rather than the generally used 20 kV, improves analysis accuracy and may improve spatial resolution, but at the cost of a smaller backscattered electron signal and potentially smaller rate of generation of characteristic X-rays. These effects were quantified by simulation and practical measurements.


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