Interaction between arsenic, hydrogen, and silicon matrix in doping of sputtered amorphous hydrogenated silicon
1989 ◽
Vol 36
(12)
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pp. 2863-2867
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Keyword(s):
1993 ◽
Vol 164-166
◽
pp. 235-238
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Keyword(s):
1998 ◽
Vol 1
(2)
◽
pp. 81-85
Keyword(s):
1996 ◽
Vol 43
(9)
◽
pp. 1592-1601
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Keyword(s):
1988 ◽
Vol 92
(11)
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pp. 1350-1353
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