Interaction between arsenic, hydrogen, and silicon matrix in doping of sputtered amorphous hydrogenated silicon

1981 ◽  
Vol 39 (2) ◽  
pp. 152-154 ◽  
Author(s):  
M. Toulemonde ◽  
P. Siffert ◽  
A. Deneuville ◽  
J. C. Bruyère
1987 ◽  
Vol 97 ◽  
Author(s):  
Richard B. Rizk ◽  
Alain E. Kaloyeros ◽  
Wendell S. Williams ◽  
Nancy Finnegan ◽  
Carol Kozlowski

The field of amorphous hydrogenated silicon-carbon alloys and thin films has witnessed, since the pioneering work of Anderson and Spear [1], rapid development and has attracted scientific attention and technological interest [2,3]. However, relatively little information is known [4] about the physical mechanisms that govern the inclusion of C and H in the silicon matrix, the nature of the chemical bonds involved, and the structural changes that result in the amorphous phase. Clearly, further fundamental studies are needed to achieve complete understanding of such amorphous systems with variable disorder.


1989 ◽  
Vol 36 (12) ◽  
pp. 2863-2867 ◽  
Author(s):  
M.B. Schubert ◽  
H.-D. Mohring ◽  
E. Lotter ◽  
G.H. Bauer

2014 ◽  
Vol 48 (2) ◽  
pp. 235-238 ◽  
Author(s):  
A. V. Belolipetskiy ◽  
O. B. Gusev ◽  
A. P. Dmitriev ◽  
E. I. Terukov ◽  
I. N. Yassievich

2008 ◽  
Vol 1066 ◽  
Author(s):  
Tetyana V. Torchynska

ABSTRACTThis paper presents the results of XRD and PL spectrum studies for Si nano-clusters embedded in amorphous silicon matrix. Investigated layers were deposited by the hot-wire CVD method on glass substrates at the wafer temperature 300°C and different filament temperatures from the range 1735-1885°C. It was shown that variation of filament temperatures allows producing the films with desirable parameters. Using of X-ray diffraction and photoluminescence methods the correlation between the intensity of some photoluminescence bands and the concentrations of Si nanocrystallites and amorphous Si nanoclusters has been shown. The nature of light emission is discussed.


1993 ◽  
Vol 164-166 ◽  
pp. 235-238 ◽  
Author(s):  
O. Klíma ◽  
O. Štika ◽  
Ho Tha Ha ◽  
S. Fouad Abdel Hamied ◽  
J. Stuchlík ◽  
...  

1998 ◽  
Vol 1 (2) ◽  
pp. 81-85
Author(s):  
Clara EE Hanekamp ◽  
Hans JRM Bonnier ◽  
Rolf H Michels ◽  
Kathinka H Peels ◽  
Eric PCM Heijmen ◽  
...  

1996 ◽  
Vol 43 (9) ◽  
pp. 1592-1601 ◽  
Author(s):  
S.J. Bijlsma ◽  
H. van Kranenburg ◽  
K.J.B.M. Nieuwesteeg ◽  
M.G. Pitt ◽  
J.F. Verweij

Sign in / Sign up

Export Citation Format

Share Document