A tunable, ultrahigh spectral brightness KrF* excimer laser source

1980 ◽  
Vol 36 (6) ◽  
pp. 391-392 ◽  
Author(s):  
R. T. Hawkins ◽  
H. Egger ◽  
J. Bokor ◽  
C. K. Rhodes
Keyword(s):  
Excimer Laser ◽  
Laser Source ◽  
Spectral Brightness ◽  
Krf Excimer Laser

Subpicosecond KrF* excimer-laser source

1986 ◽  
Vol 11 (8) ◽  
pp. 499 ◽  
Author(s):  
A. P. Schwarzenbach ◽  
T. S. Luk ◽  
I. A. McIntyre ◽  
U. Johann ◽  
A. McPherson ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Source ◽  
Krf Excimer Laser

A tunable, ultrahigh‐spectral‐brightness ArF* excimer laser source

1981 ◽  
Vol 39 (1) ◽  
pp. 37-39 ◽  
Author(s):  
H. Egger ◽  
T. Srinivasan ◽  
K. Hohla ◽  
H. Scheingraber ◽  
C. R. Vidal ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Source ◽  
Spectral Brightness ◽  
Arf Excimer Laser

Tunable ultrahigh spectral brightness ArF* excimer laser source

1981 ◽  
Author(s):  
H. Egger ◽  
T. Srinivasan ◽  
K. Hohla ◽  
H. Scheingraber ◽  
C. R. Vidal ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Source ◽  
Spectral Brightness ◽  
Arf Excimer Laser

Tunable ultrahigh spectral brightness ArF* excimer laser source

1981 ◽  
Vol 17 (12) ◽  
pp. 2466-2466
Author(s):  
H. Egger ◽  
T. Srinivasan ◽  
K. Hohla ◽  
H. Scheingraber ◽  
C. Vidal ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Source ◽  
Spectral Brightness ◽  
Arf Excimer Laser

Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth

1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2354-2356
Author(s):  
Yasuhiro Shimada ◽  
Koichi Wani ◽  
Yoshiro Ogata
Keyword(s):  
Excimer Laser ◽  
Wavelength Stabilization ◽  
Krf Excimer Laser ◽  
Pressure Controlled

Preparation of boron carbide thin film by pulsed KrF excimer laser deposition process

2002 ◽  
Vol 407 (1-2) ◽  
pp. 126-131 ◽  
Author(s):  
Shin-ichi Aoqui ◽  
Hisatomo Miyata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara
Keyword(s):  
Thin Film ◽  
Boron Carbide ◽  
Excimer Laser ◽  
Deposition Process ◽  
Laser Deposition ◽  
Krf Excimer Laser

An Advanced KrF Excimer Laser Stepper For Production Of 16MDRAMs

1988 ◽  
Author(s):  
Hideo Nakagawa ◽  
Masaru Sasago ◽  
Masayuki Endo ◽  
Yushihiko Hirai ◽  
Kazufumi Ogawa ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Krf Excimer Laser

Single pulse vibrational Raman scattering by a broadband KrF excimer laser in a hydrogen–air flame

1990 ◽  
Vol 29 (15) ◽  
pp. 2325 ◽  
Author(s):  
Robert W. Pitz ◽  
Joseph A. Wehrmeyer ◽  
J. M. Bowling ◽  
Tsarng-Sheng Cheng
Keyword(s):  
Raman Scattering ◽  
Excimer Laser ◽  
Single Pulse ◽  
Krf Excimer Laser
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