Microscopic and macroscopic modeling of layer growth kinetics and morphology in vapor deposition processing
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2014 ◽
Vol 17
(4)
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pp. 512-522
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2005 ◽
Vol 53
(8)
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pp. 2361-2368
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2007 ◽
Vol 305
(1)
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pp. 113-121
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Keyword(s):
2011 ◽
Vol 50
(6S)
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pp. 06GE04
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