Silicon atomic layer growth controlled by flash heating in chemical vapor deposition using SiH4gas

1993 ◽  
Vol 62 (19) ◽  
pp. 2353-2355 ◽  
Author(s):  
Junichi Murota ◽  
Masao Sakuraba ◽  
Shoichi Ono
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Atomic Layer ◽  
Layer Growth

Atomic layer growth of silicon by excimer laser induced cryogenic chemical vapor deposition

1990 ◽  
Vol 56 (15) ◽  
pp. 1445-1447 ◽  
Author(s):  
T. Tanaka ◽  
T. Fukuda ◽  
Y. Nagasawa ◽  
S. Miyazaki ◽  
M. Hirose
Keyword(s):  
Chemical Vapor Deposition ◽  
Excimer Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Atomic Layer ◽  
Layer Growth

Atomic Layer Chemical Vapor Deposition

2012 ◽  
pp. 160-160
Author(s):  
Antonio Aliano ◽  
Giancarlo Cicero ◽  
Hossein Nili ◽  
Nicolas G. Green ◽  
Pablo García-Sánchez ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Atomic Layer

scholarly journals Applications of atomic layer deposition and chemical vapor deposition for perovskite solar cells

2020 ◽  
Vol 13 (7) ◽  
pp. 1997-2023 ◽  
Author(s):  
James A. Raiford ◽  
Solomon T. Oyakhire ◽  
Stacey F. Bent
Keyword(s):  
Solar Cells ◽  
Chemical Vapor Deposition ◽  
Atomic Layer Deposition ◽  
Vapor Deposition ◽  
Perovskite Solar Cells ◽  
Chemical Vapor ◽  
Atomic Layer ◽  
Layer Deposition

A review on the versatility of atomic layer deposition and chemical vapor deposition for the fabrication of stable and efficient perovskite solar cells.

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