Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge

2020 ◽  
Vol 116 (6) ◽  
pp. 064101 ◽  
Author(s):  
Rainer Hippler ◽  
Martin Cada ◽  
Zdenek Hubicka
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Langmuir Probe ◽  
Time Resolved ◽  
Probe Diagnostics

Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges

Vacuum ◽  
2013 ◽  
Vol 90 ◽  
pp. 176-181 ◽  
Author(s):  
Steffen Drache ◽  
Vitezslav Stranak ◽  
Ann-Pierra Herrendorf ◽  
Martin Cada ◽  
Zdenek Hubicka ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Langmuir Probe ◽  
Time Resolved ◽  
Probe Investigation

scholarly journals Influence of the High-Power Impulse Magnetron Sputtering Voltage on the Time-Resolved Platinum Ions Energy Distributions

2014 ◽  
Vol 42 (10) ◽  
pp. 2818-2819 ◽  
Author(s):  
Stephane Cuynet ◽  
Amael Caillard ◽  
Thomas Lecas ◽  
Sebastien Dozias ◽  
Philippe Lefaucheux ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Energy Distributions ◽  
Time Resolved

System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron sputtering

2017 ◽  
Vol 88 (2) ◽  
pp. 023105
Author(s):  
P. Adámek ◽  
J. Olejníček ◽  
Z. Hubička ◽  
M. Čada ◽  
Š. Kment ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Absorption Spectroscopy ◽  
High Power ◽  
Laser Absorption Spectroscopy ◽  
Time Resolved ◽  
Laser Absorption

Time-Resolved Diagnostics of Dual High Power Impulse Magnetron Sputtering With Pulse Delays of 15 µs and 500 µs

2011 ◽  
Vol 51 (2-3) ◽  
pp. 237-245 ◽  
Author(s):  
V. Stranak ◽  
S. Drache ◽  
M. Cada ◽  
Z. Hubicka ◽  
M. Tichy ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Time Resolved

Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation

2013 ◽  
Vol 117 (40) ◽  
pp. 10211-10217 ◽  
Author(s):  
Chuhang Zhang ◽  
Hironori Tsunoyama ◽  
Hiroki Akatsuka ◽  
Hiroki Sekiya ◽  
Tomomi Nagase ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Ion Source ◽  
Time Resolved ◽  
Time Resolved Measurements

scholarly journals Time resolved tunable diode laser absoption spectroscopy of dual High Power Impulse Magnetron Sputtering discharges

2014 ◽  
Vol 32 ◽  
pp. 1460337
Author(s):  
Hoang Tung Do ◽  
Vitezslav Stranak ◽  
Rainer Hippler
Keyword(s):  
Magnetron Sputtering ◽  
Diode Laser ◽  
High Power ◽  
Field Configuration ◽  
Tunable Diode Laser ◽  
Buffer Gas ◽  
Time Resolved ◽  
Laser Absorption ◽  
Metal Atoms ◽  
Diode Laser Absorption

Time-resolved measurements have been performed during dual High Power Impulse Magnetron Sputtering (dual-HiPIMS) with two cathodes in a closed magnetic field configuration. The dual-HiPIMS system, operated at a repetition frequency f = 100 Hz and duty cycle of 1 %, was equipped with two different metallic targets (Ti, Cu). The effect of a delay between subsequent pulses on argon excited atom density and temperature was investigated by means of tunable diode laser absorption spectroscopy. It is shown that the peak densities of pulses vary strongly with the delay. We observed an enhancement of metastable density due to pre-ionization effect but more effective than that is the contribution of metal atoms which have smaller ionization energy compare to that of buffer gas atom. Associate with the enhancement of density, the temporal variation of metastable atom temperature in the Cu pulse also transforms from those of low current pulse into the high current one.

Time-resolved investigation of dual high power impulse magnetron sputtering with closed magnetic field during deposition of Ti–Cu thin films

2010 ◽  
Vol 108 (4) ◽  
pp. 043305 ◽  
Author(s):  
Vitezslav Stranak ◽  
Martin Cada ◽  
Zdenek Hubicka ◽  
Milan Tichy ◽  
Rainer Hippler
Keyword(s):  
Magnetic Field ◽  
Thin Films ◽  
Magnetron Sputtering ◽  
High Power ◽  
Time Resolved
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