Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering

2016 ◽  
Vol 34 (4) ◽  
pp. 041305 ◽  
Author(s):  
Daniel Lundin ◽  
Martin Čada ◽  
Zdenĕk Hubička
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Ion Flux ◽  
Time Resolved ◽  
Impedance Measurements ◽  
Process Characterization

The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge

2006 ◽  
Vol 515 (4) ◽  
pp. 1522-1526 ◽  
Author(s):  
J. Bohlmark ◽  
M. Lattemann ◽  
J.T. Gudmundsson ◽  
A.P. Ehiasarian ◽  
Y. Aranda Gonzalvo ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Ion Flux ◽  
Energy Distributions ◽  
Ion Energy ◽  
Flux Composition ◽  
Ion Energy Distributions

Ion flux characteristics in high-power pulsed magnetron sputtering discharges

2007 ◽  
Vol 77 (4) ◽  
pp. 45002 ◽  
Author(s):  
J Vlček ◽  
P Kudláček ◽  
K Burcalová ◽  
J Musil
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Ion Flux ◽  
Pulsed Magnetron

scholarly journals Influence of the High-Power Impulse Magnetron Sputtering Voltage on the Time-Resolved Platinum Ions Energy Distributions

2014 ◽  
Vol 42 (10) ◽  
pp. 2818-2819 ◽  
Author(s):  
Stephane Cuynet ◽  
Amael Caillard ◽  
Thomas Lecas ◽  
Sebastien Dozias ◽  
Philippe Lefaucheux ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Energy Distributions ◽  
Time Resolved

Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges

Vacuum ◽  
2013 ◽  
Vol 90 ◽  
pp. 176-181 ◽  
Author(s):  
Steffen Drache ◽  
Vitezslav Stranak ◽  
Ann-Pierra Herrendorf ◽  
Martin Cada ◽  
Zdenek Hubicka ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Langmuir Probe ◽  
Time Resolved ◽  
Probe Investigation

System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron sputtering

2017 ◽  
Vol 88 (2) ◽  
pp. 023105
Author(s):  
P. Adámek ◽  
J. Olejníček ◽  
Z. Hubička ◽  
M. Čada ◽  
Š. Kment ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Absorption Spectroscopy ◽  
High Power ◽  
Laser Absorption Spectroscopy ◽  
Time Resolved ◽  
Laser Absorption

scholarly journals Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOxfilm growth

2016 ◽  
Vol 25 (1) ◽  
pp. 015022 ◽  
Author(s):  
Robert Franz ◽  
César Clavero ◽  
Jonathan Kolbeck ◽  
André Anders
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Ion Flux

Time-Resolved Diagnostics of Dual High Power Impulse Magnetron Sputtering With Pulse Delays of 15 µs and 500 µs

2011 ◽  
Vol 51 (2-3) ◽  
pp. 237-245 ◽  
Author(s):  
V. Stranak ◽  
S. Drache ◽  
M. Cada ◽  
Z. Hubicka ◽  
M. Tichy ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Time Resolved

Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation

2013 ◽  
Vol 117 (40) ◽  
pp. 10211-10217 ◽  
Author(s):  
Chuhang Zhang ◽  
Hironori Tsunoyama ◽  
Hiroki Akatsuka ◽  
Hiroki Sekiya ◽  
Tomomi Nagase ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Ion Source ◽  
Time Resolved ◽  
Time Resolved Measurements
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