System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron sputtering

2017 ◽  
Vol 88 (2) ◽  
pp. 023105
Author(s):  
P. Adámek ◽  
J. Olejníček ◽  
Z. Hubička ◽  
M. Čada ◽  
Š. Kment ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Absorption Spectroscopy ◽  
High Power ◽  
Laser Absorption Spectroscopy ◽  
Time Resolved ◽  
Laser Absorption

Temperature Dependent Kinetics of the OH/HO2/O3Chain Reaction by Time-Resolved IR Laser Absorption Spectroscopy

2000 ◽  
Vol 104 (17) ◽  
pp. 3964-3973 ◽  
Author(s):  
Sergey A. Nizkorodov ◽  
Warren W. Harper ◽  
Bradley W. Blackmon ◽  
David J. Nesbitt
Keyword(s):  
Absorption Spectroscopy ◽  
Laser Absorption Spectroscopy ◽  
Temperature Dependent ◽  
Time Resolved ◽  
Laser Absorption ◽  
Ir Laser ◽  
Kinetics Of

Time-resolved tunable diode laser absorption spectroscopy of pulsed plasma

2013 ◽  
Vol 38 (14) ◽  
pp. 2428 ◽  
Author(s):  
P. Adámek ◽  
J. Olejníček ◽  
M. Čada ◽  
Š. Kment ◽  
Z. Hubička
Keyword(s):  
Diode Laser ◽  
Absorption Spectroscopy ◽  
Tunable Diode Laser ◽  
Pulsed Plasma ◽  
Laser Absorption Spectroscopy ◽  
Time Resolved ◽  
Laser Absorption ◽  
Diode Laser Absorption

scholarly journals Time resolved tunable diode laser absoption spectroscopy of dual High Power Impulse Magnetron Sputtering discharges

2014 ◽  
Vol 32 ◽  
pp. 1460337
Author(s):  
Hoang Tung Do ◽  
Vitezslav Stranak ◽  
Rainer Hippler
Keyword(s):  
Magnetron Sputtering ◽  
Diode Laser ◽  
High Power ◽  
Field Configuration ◽  
Tunable Diode Laser ◽  
Buffer Gas ◽  
Time Resolved ◽  
Laser Absorption ◽  
Metal Atoms ◽  
Diode Laser Absorption

Time-resolved measurements have been performed during dual High Power Impulse Magnetron Sputtering (dual-HiPIMS) with two cathodes in a closed magnetic field configuration. The dual-HiPIMS system, operated at a repetition frequency f = 100 Hz and duty cycle of 1 %, was equipped with two different metallic targets (Ti, Cu). The effect of a delay between subsequent pulses on argon excited atom density and temperature was investigated by means of tunable diode laser absorption spectroscopy. It is shown that the peak densities of pulses vary strongly with the delay. We observed an enhancement of metastable density due to pre-ionization effect but more effective than that is the contribution of metal atoms which have smaller ionization energy compare to that of buffer gas atom. Associate with the enhancement of density, the temporal variation of metastable atom temperature in the Cu pulse also transforms from those of low current pulse into the high current one.

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