On the E to H mode transition in a dual frequency (2 and 13.56 MHz) inductively coupled plasma

2020 ◽  
Vol 27 (2) ◽  
pp. 023503 ◽  
Author(s):  
Ju-Ho Kim ◽  
Chin-Wook Chung
Keyword(s):  
Inductively Coupled Plasma ◽  
Mode Transition ◽  
Dual Frequency ◽  
Inductively Coupled

E→H mode transition density and power in two types of inductively coupled plasma configuration

2014 ◽  
Vol 21 (7) ◽  
pp. 073502 ◽  
Author(s):  
Jian Wang ◽  
Yin-chang Du ◽  
Xiao Zhang ◽  
Zhe Zheng ◽  
Yu Liu ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Transition Density ◽  
Mode Transition ◽  
Inductively Coupled ◽  
Plasma Configuration

Tungsten deposition by dual-frequency inductively coupled plasma-assisted CVD

1999 ◽  
Vol 116-119 ◽  
pp. 863-867 ◽  
Author(s):  
P. Colpo ◽  
T. Meziani ◽  
N. Gibson ◽  
G. Ceccone ◽  
F. Rossi
Keyword(s):  
Inductively Coupled Plasma ◽  
Dual Frequency ◽  
Inductively Coupled

Altering the sulfur content in the propanethiol plasma polymers using the capacitive-to-inductive mode transition in inductively coupled plasma discharge

2012 ◽  
Vol 100 (7) ◽  
pp. 071604 ◽  
Author(s):  
Damien Thiry ◽  
Nikolay Britun ◽  
Stephanos Konstantinidis ◽  
Jean-Pierre Dauchot ◽  
Laurent Denis ◽  
...  
Keyword(s):  
Sulfur Content ◽  
Inductively Coupled Plasma ◽  
Plasma Discharge ◽  
Mode Transition ◽  
Plasma Polymers ◽  
Inductively Coupled
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