Electron density modulation in a pulsed dual-frequency (2/13.56 MHz) dual-antenna inductively coupled plasma discharge

2016 ◽  
Vol 34 (5) ◽  
pp. 051302 ◽  
Author(s):  
Nishant Sirse ◽  
Anurag Mishra ◽  
Geun Y. Yeom ◽  
Albert R. Ellingboe
Keyword(s):  
Electron Density ◽  
Inductively Coupled Plasma ◽  
Plasma Discharge ◽  
Dual Frequency ◽  
Inductively Coupled ◽  
Density Modulation

scholarly journals Simulation study of an inductively coupled plasma discharge with different copper coil designs and gas compositions

AIP Advances ◽  
2019 ◽  
Vol 9 (8) ◽  
pp. 085228 ◽  
Author(s):  
Fan Lei ◽  
Xiaoping Li ◽  
Donglin Liu ◽  
Yanming Liu ◽  
Shun Zhang
Keyword(s):  
Simulation Study ◽  
Inductively Coupled Plasma ◽  
Plasma Discharge ◽  
Inductively Coupled ◽  
Copper Coil
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