Altering the sulfur content in the propanethiol plasma polymers using the capacitive-to-inductive mode transition in inductively coupled plasma discharge

2012 ◽  
Vol 100 (7) ◽  
pp. 071604 ◽  
Author(s):  
Damien Thiry ◽  
Nikolay Britun ◽  
Stephanos Konstantinidis ◽  
Jean-Pierre Dauchot ◽  
Laurent Denis ◽  
...  
Keyword(s):  
Sulfur Content ◽  
Inductively Coupled Plasma ◽  
Plasma Discharge ◽  
Mode Transition ◽  
Plasma Polymers ◽  
Inductively Coupled

scholarly journals Simulation study of an inductively coupled plasma discharge with different copper coil designs and gas compositions

AIP Advances ◽  
2019 ◽  
Vol 9 (8) ◽  
pp. 085228 ◽  
Author(s):  
Fan Lei ◽  
Xiaoping Li ◽  
Donglin Liu ◽  
Yanming Liu ◽  
Shun Zhang
Keyword(s):  
Simulation Study ◽  
Inductively Coupled Plasma ◽  
Plasma Discharge ◽  
Inductively Coupled ◽  
Copper Coil
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