scholarly journals Study of gasdynamic electron cyclotron resonance plasma vacuum ultraviolet emission to optimize negative hydrogen ion production efficiency

2020 ◽  
Vol 91 (1) ◽  
pp. 013517 ◽  
Author(s):  
R. L. Lapin ◽  
V. A. Skalyga ◽  
I. Izotov ◽  
S. V. Razin ◽  
R. A. Shaposhnikov ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Production Efficiency ◽  
Vacuum Ultraviolet ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Hydrogen Ion ◽  
Ultraviolet Emission ◽  
Electron Cyclotron Resonance Plasma ◽  
Ion Production ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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