Experimental investigation on the reduction in antenna coil current during the E to H mode transition in an inductively coupled plasma

Jun-Hyeon Moon; Ho-Jun Moon; Chin-Wook Chung

doi:10.1063/1.5099290

Experimental investigation on the reduction in antenna coil current during the E to H mode transition in an inductively coupled plasma

Physics of Plasmas ◽

10.1063/1.5099290 ◽

2019 ◽

Vol 26 (9) ◽

pp. 093505 ◽

Cited By ~ 2

Author(s):

Jun-Hyeon Moon ◽

Ho-Jun Moon ◽

Chin-Wook Chung

Keyword(s):

Experimental Investigation ◽

Inductively Coupled Plasma ◽

Mode Transition ◽

Coil Current ◽

Inductively Coupled

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Experimental investigation of edge-to-center density ratio in E-H mode transition of an inductively coupled plasma

Physics of Plasmas ◽

10.1063/1.5001961 ◽

2017 ◽

Vol 24 (12) ◽

pp. 123506 ◽

Cited By ~ 4

Author(s):

Il-seo Park ◽

Hyun-Ju Kang ◽

Kyung-Hyun Kim ◽

Chin-Wook Chung

Keyword(s):

Experimental Investigation ◽

Inductively Coupled Plasma ◽

Density Ratio ◽

Mode Transition ◽

Inductively Coupled ◽

Center Density

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Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma

IEEE Transactions on Plasma Science ◽

10.1109/tps.2011.2135382 ◽

2011 ◽

Vol 39 (11) ◽

pp. 2536-2537 ◽

Cited By ~ 8

Author(s):

Hyo-Chang Lee ◽

Young-Cheol Kim ◽

Chin-Wook Chung

Keyword(s):

Plasma Density ◽

Inductively Coupled Plasma ◽

Mode Transition ◽

Two Dimensional ◽

Inductively Coupled ◽

Heating Mode

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Experimental investigation of inductively coupled plasma etching on cemented carbides

Vacuum ◽

10.1016/j.vacuum.2019.01.032 ◽

2019 ◽

Vol 162 ◽

pp. 101-109 ◽

Cited By ~ 4

Author(s):

Yunsong Lian ◽

Chenliang Mu ◽

Chaoping Xie ◽

Bin Yao

Keyword(s):

Experimental Investigation ◽

Plasma Etching ◽

Inductively Coupled Plasma ◽

Cemented Carbides ◽

Inductively Coupled Plasma Etching ◽

Inductively Coupled

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Evolution of two-dimensional plasma parameters in the plane of the wafer during the E- to H- and H- to E-mode transition in an inductively coupled plasma

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aac241 ◽

2018 ◽

Vol 27 (5) ◽

pp. 055018 ◽

Cited By ~ 1

Author(s):

Il-Seo Park ◽

Kyung-Hyun Kim ◽

Tae-Woo Kim ◽

Kwan-Youg Kim ◽

Ho-Jun Moon ◽

...

Keyword(s):

Inductively Coupled Plasma ◽

Mode Transition ◽

Two Dimensional ◽

Plasma Parameters ◽

Inductively Coupled

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Mode Transition and Hysteresis in Inductively Coupled Plasma Sources

Plasma Science and Technology - Basic Fundamentals and Modern Applications ◽

10.5772/intechopen.76654 ◽

2019 ◽

Author(s):

Shu-Xia Zhao

Keyword(s):

Inductively Coupled Plasma ◽

Mode Transition ◽

Plasma Sources ◽

Inductively Coupled

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Experimental Investigation of Inductively Coupled Plasma Cathode for the Application to Ion Thrusters

47th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit ◽

10.2514/6.2011-5989 ◽

2011 ◽

Cited By ~ 2

Author(s):

Hiroki Watanabe ◽

Takuya Nakabayashi ◽

Satoshi Kasagami ◽

Junichiro Aoyagi ◽

Haruki Takegahara

Keyword(s):

Experimental Investigation ◽

Inductively Coupled Plasma ◽

Plasma Cathode ◽

Inductively Coupled ◽

Ion Thrusters

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E→H mode transition density and power in two types of inductively coupled plasma configuration

Physics of Plasmas ◽

10.1063/1.4886147 ◽

2014 ◽

Vol 21 (7) ◽

pp. 073502 ◽

Cited By ~ 14

Author(s):

Jian Wang ◽

Yin-chang Du ◽

Xiao Zhang ◽

Zhe Zheng ◽

Yu Liu ◽

...

Keyword(s):

Inductively Coupled Plasma ◽

Transition Density ◽

Mode Transition ◽

Inductively Coupled ◽

Plasma Configuration

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Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O 2 inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.5079585 ◽

2019 ◽

Vol 125 (2) ◽

pp. 023303 ◽

Cited By ~ 4

Author(s):

Chan Xue ◽

Fei Gao ◽

De-Qi Wen ◽

You-Nian Wang

Keyword(s):

Experimental Investigation ◽

Radio Frequency ◽

Electron Impact ◽

Inductively Coupled Plasma ◽

Impact Excitation ◽

Electron Impact Excitation ◽

Inductively Coupled

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Spatiotemporal optical structure of plasmas in the E-to-H mode transition in an inductively coupled plasma in Ar

Plasma Sources Science and Technology ◽

10.1088/0963-0252/19/5/055007 ◽

2010 ◽

Vol 19 (5) ◽

pp. 055007 ◽

Cited By ~ 10

Author(s):

Satoshi Morishita ◽

Yuichiro Hayashi ◽

Toshiaki Makabe

Keyword(s):

Inductively Coupled Plasma ◽

Mode Transition ◽

Inductively Coupled ◽

Optical Structure

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Experimental Investigation of High Efficient Inductively Coupled Plasma by Splitting External Antenna Coil

2017 IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2017.8496142 ◽

2017 ◽

Author(s):

H. S. Rhee ◽

D. H. Kim ◽

S. Nawaz ◽

S. J. Yoon

Keyword(s):

Experimental Investigation ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

High Efficient

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