Experimental investigation of edge-to-center density ratio in E-H mode transition of an inductively coupled plasma

2017 ◽  
Vol 24 (12) ◽  
pp. 123506 ◽  
Author(s):  
Il-seo Park ◽  
Hyun-Ju Kang ◽  
Kyung-Hyun Kim ◽  
Chin-Wook Chung
Keyword(s):  
Experimental Investigation ◽  
Inductively Coupled Plasma ◽  
Density Ratio ◽  
Mode Transition ◽  
Inductively Coupled ◽  
Center Density

Global model for pulsed inductively coupled plasma sources: Effect of edge-to-center density ratio and electron heating

2020 ◽  
Vol 27 (7) ◽  
pp. 073507
Author(s):  
Deuk-Chul Kwon ◽  
Dong-Hun Yu ◽  
Hyoungcheol Kwon ◽  
Yeon Ho Im ◽  
Hyo-Chang Lee
Keyword(s):  
Inductively Coupled Plasma ◽  
Density Ratio ◽  
Global Model ◽  
Electron Heating ◽  
Plasma Sources ◽  
Inductively Coupled ◽  
Center Density

E→H mode transition density and power in two types of inductively coupled plasma configuration

2014 ◽  
Vol 21 (7) ◽  
pp. 073502 ◽  
Author(s):  
Jian Wang ◽  
Yin-chang Du ◽  
Xiao Zhang ◽  
Zhe Zheng ◽  
Yu Liu ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Transition Density ◽  
Mode Transition ◽  
Inductively Coupled ◽  
Plasma Configuration
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