scholarly journals Zero temperature coefficient of sound velocity in vitreous silicon oxynitride thin films

2019 ◽  
Vol 114 (25) ◽  
pp. 251905 ◽  
Author(s):  
A. Nagakubo ◽  
S. Tsuboi ◽  
Y. Kabe ◽  
S. Matsuda ◽  
A. Koreeda ◽  
...  
Keyword(s):  
Thin Films ◽  
Sound Velocity ◽  
Temperature Coefficient ◽  
Silicon Oxynitride ◽  
Zero Temperature

Piezoelectrically Transduced Hybrid Resonators

2011 ◽  
Vol 219-220 ◽  
pp. 1500-1503
Author(s):  
Zhi Zheng Wu
Keyword(s):  
Thin Films ◽  
Sound Velocity ◽  
Temperature Coefficient ◽  
Stability Problem ◽  
Frequency Stability ◽  
Positive Temperature Coefficient ◽  
Zno Thin Films ◽  
Positive Temperature ◽  
Surface Micromachining ◽  
Fabrication Technique

In this paper, the design for a new piezoelectrically transduced hybrid resonator is proposed. The frequency stability problem is improved by using two different thin films with a negative and positive temperature coefficient of sound velocity, respectively, where the main vibrating structure is constructed by the SiO2 and ZnO thin films. This new hybrid resonator combines the advantages of piezoelectric and capacitive resonators together and can be implemented by the simple fabrication technique utilizing surface micromachining.

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