In-line method for extracting the temperature coefficient of resistance of surface-micromachined polysilicon thin films
2007 ◽
Vol 136
(1)
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pp. 249-254
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Keyword(s):
2013 ◽
Vol 117
(8)
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pp. 3713-3717
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2006 ◽
Vol 16
(4)
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pp. 527-532
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2020 ◽
2011 ◽
Vol 50
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pp. 125801
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Keyword(s):