Fluid simulation of the plasma uniformity in pulsed dual frequency inductively coupled plasma

2019 ◽  
Vol 26 (4) ◽  
pp. 043503 ◽  
Author(s):  
Xiao-Yan Sun ◽  
Yu-Ru Zhang ◽  
Sen Chai ◽  
You-Nian Wang ◽  
Jian-Xin He
Keyword(s):  
Inductively Coupled Plasma ◽  
Fluid Simulation ◽  
Dual Frequency ◽  
Inductively Coupled

scholarly journals Multi-fluid simulation models for inductively coupled plasma sources

2017 ◽  
Author(s):  
Madhusudhan Kundrapu ◽  
Seth A. Veitzer ◽  
Peter H. Stoltz ◽  
Kristian R. C. Beckwith ◽  
Jonathan Smith
Keyword(s):  
Inductively Coupled Plasma ◽  
Simulation Models ◽  
Fluid Simulation ◽  
Plasma Sources ◽  
Inductively Coupled

Tungsten deposition by dual-frequency inductively coupled plasma-assisted CVD

1999 ◽  
Vol 116-119 ◽  
pp. 863-867 ◽  
Author(s):  
P. Colpo ◽  
T. Meziani ◽  
N. Gibson ◽  
G. Ceccone ◽  
F. Rossi
Keyword(s):  
Inductively Coupled Plasma ◽  
Dual Frequency ◽  
Inductively Coupled

Fluid simulation of the superimposed dual-frequency source effect in inductively coupled discharges

2021 ◽  
Vol 28 (11) ◽  
pp. 113504
Author(s):  
Xiao-Yan Sun ◽  
Yu-Ru Zhang ◽  
You-Nian Wang ◽  
Jian-Xin He
Keyword(s):  
Fluid Simulation ◽  
Dual Frequency ◽  
Source Effect ◽  
Inductively Coupled ◽  
Frequency Source

Properties of an Internal U-Shaped Inductively Coupled Plasma Source Operated by Superimposed Dual Frequency

2018 ◽  
Vol 46 (9) ◽  
pp. 3159-3164
Author(s):  
Do Han Kim ◽  
Tae Hyung Kim ◽  
Soo Jung Lee ◽  
Won Oh Lee ◽  
Kyong Nam Kim ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Source ◽  
Dual Frequency ◽  
Inductively Coupled
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