In situmetrology for adaptive x-ray optics with an absolute distance measuring sensor array

V. G. Badami; E. Abruña; L. Huang; M. Idir

doi:10.1063/1.5060954

In situmetrology for adaptive x-ray optics with an absolute distance measuring sensor array

Review of Scientific Instruments ◽

10.1063/1.5060954 ◽

2019 ◽

Vol 90 (2) ◽

pp. 021703 ◽

Cited By ~ 2

Author(s):

V. G. Badami ◽

E. Abruña ◽

L. Huang ◽

M. Idir

Keyword(s):

Sensor Array ◽

Absolute Distance ◽

Ray Optics ◽

X Ray ◽

Measuring Sensor ◽

Distance Measuring

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In-situ metrology for adaptive x-ray optics with an array of interferometric absolute distance measuring sensors

10.1063/1.5084658 ◽

2019 ◽

Author(s):

Vivek G. Badami ◽

Ernesto Abruña ◽

Lei Huang ◽

Mourad Idir

Keyword(s):

Absolute Distance ◽

Ray Optics ◽

X Ray ◽

In Situ Metrology ◽

Distance Measuring

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Real-time feedback for x-ray adaptive optics with an interferometric absolute distance sensor array

Adaptive X-Ray Optics V ◽

10.1117/12.2323698 ◽

2018 ◽

Author(s):

Vivek G. Badami ◽

Lei Huang ◽

Mourad Idir ◽

Ernesto Abruña

Keyword(s):

Real Time ◽

Adaptive Optics ◽

Sensor Array ◽

Absolute Distance ◽

X Ray ◽

Distance Sensor

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X-ray microprobe for materials science

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100168013 ◽

1994 ◽

Vol 52 ◽

pp. 56-57

Author(s):

G.E. Ice

Keyword(s):

Crystallographic Orientation ◽

Local Structure ◽

Materials Science ◽

Chemical Information ◽

X Ray Diffraction ◽

Ray Optics ◽

X Ray ◽

Novel Materials ◽

New Information ◽

Elemental Sensitivity

The increasing availability of synchrotron x-ray sources has stimulated the development of advanced hard x-ray (E≥5 keV) microprobes. With new x-ray optics these microprobes can achieve micron and submicron spatial resolutions. The inherent elemental and crystallographic sensitivity of an x-ray microprobe and its inherently nondestructive and penetrating nature will have important applications to materials science. For example, x-ray fluorescent microanalysis of materials can reveal elemental distributions with greater sensitivity than alternative nondestructive probes. In materials, segregation and nonuniform distributions are the rule rather than the exception. Common interfaces to whichsegregation occurs are surfaces, grain and precipitate boundaries, dislocations, and surfaces formed by defects such as vacancy and interstitial configurations. In addition to chemical information, an x-ray diffraction microprobe can reveal the local structure of a material by detecting its phase, crystallographic orientation and strain.Demonstration experiments have already exploited the penetrating nature of an x-ray microprobe and its inherent elemental sensitivity to provide new information about elemental distributions in novel materials.

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