Electrolyte diffusion model in macroporous silicon photo-electrochemical etching and its application in macropore diameter control

2018 ◽  
Vol 124 (8) ◽  
pp. 085709
Author(s):  
Qi Chen ◽  
Guozheng Wang ◽  
Ji Wang ◽  
Jikai Yang ◽  
Qingduo Duanmu
Keyword(s):  
Diffusion Model ◽  
Electrochemical Etching ◽  
Macroporous Silicon ◽  
Diameter Control

Influence of voltage on photo-electrochemical etching of n-type macroporous silicon arrays

2010 ◽  
Vol 31 (11) ◽  
pp. 116002 ◽  
Author(s):  
Guozheng Wang ◽  
Shencheng Fu ◽  
Li Chen ◽  
Ji Wang ◽  
Xulei Qin ◽  
...  
Keyword(s):  
Electrochemical Etching ◽  
Macroporous Silicon ◽  
Silicon Arrays

scholarly journals Features of the two-stage formation of macroporous and mesoporous silicon structuresя

2021 ◽  
Vol 23 (1) ◽  
pp. 41-48
Author(s):  
Alexander S. Lenshin ◽  
Anatoly N. Lukin ◽  
Yaroslav A. Peshkov ◽  
Sergey V. Kannykin ◽  
Boris L. Agapov ◽  
...  
Keyword(s):  
Optical Properties ◽  
Photonic Crystal ◽  
Porous Silicon ◽  
Surface Science ◽  
Electrochemical Etching ◽  
Multilayer Structures ◽  
Macroporous Silicon ◽  
Two Stage ◽  
Mesoporous Silicon ◽  
X Ray

The aim of this work was the formation of multilayer structures of macroporous silicon and the study of their structural, morphological, and optical properties in comparison with the properties of multilayer structures of mesoporous silicon. The paper presents the results of the development of techniques for the formation of multilayer structures of porous silicon por-Si by stepwise change in the current with two-stage modes of electrochemical etching.The data on the morphology, composition, and porosity of macroporous and mesoporous silicon samples were obtained using scanning electron microscopy, IR spectroscopy, and X-ray reflectivity. It was shown that with the two-stage growth of porous silicon layers, the depth of the boundary between the layers of the structure was determined by the primary mode of electrochemical etching, while the total layer thickness increased with an increase in the current density of electrochemical etching.A comparative analysis of the relative intensity and fine structure of vibrational modes of IR spectra indicated a significantly more developed specific pore surface and greater sorption capacity of mesoporous silicon as compared to macroporous silicon.     REFERENCES 1. Pacholski C. Photonic crystal sensors based on porous silicon. Sensors. 2013;13(4): 4694–4713. https://doi.org/10.3390/s130404694 2. Harraz F. A. Porous silicon chemical sensors and biosensors: A review. Sensors and Actuators B: Chemical. 2014;202: 897–912. https://doi.org/10.1016/j.snb.2014.06.0483. Qian M., Bao X. Q., Wang L. W., Lu X., Shao J., Chen X. S. Structural tailoring of multilayer porous silicon for photonic crystal application. Journal of Crystal Growth. 2006;292(2): 347–350. https://doi.org/10.1016/j.jcrysgro.2006.04.0334. Len’shin A. S., Kashkarov V. M., Turishchev S. Yu., Smirnov M. S., Domashevskaya E. P. Effect of natural aging on photoluminescence of porous silicon. Technical Physics Letters. 2011;37(9): 789–792. https://doi.org/10.1134/S10637850110901245. Kheifets L. I., Neimark A. B. Multiphase processes in porous media. Moscow: Khimiya Publ.; 1982. 320 p. (In Russ.)6. Canham L. Handbook of porous silicon. Switzerland: Springer International Publishing; 2014. 733 p.7. Zimin S. P. Porous silicon – material with new properties. Soros Educational Journal. 2004;8(1): 101–107. Available at: http://window.edu.ru/resource/217/21217/files/0401_101.pdf (In Russ., abstract in Eng.) 8. Seredin P. V., Lenshin A. S., Goloshchapov D. L., Lukin A. N., Arsentyev I. N., Bondarev A. D., Tarasov I. S. Investigations of nanodimensional Al2O3films deposited by ion-plasma sputtering onto porous silicon. Semiconductors. 2015;49(7): 915–920. https://doi.org/10.1134/S10637826150702109. Seredin P. V., Lenshin A. S., Mizerov A. M., Leiste H., Rinke M. Structural, optical and morphological properties of hybrid heterostructures on the basis of GaN grown on compliant substrate por-Si(111). Applied Surface Science. 2019;476: 1049–1060. https://doi.org/10.1016/j.apsusc.2019.01.23910. Seredin P. V., Leiste H., Lenshin A. S., Mizerov A. M. Effect of the transition porous silicon layer on the properties of hybrid GaN/SiC/por-Si/Si(111) heterostructures. Applied Surface Science. 2020;508(145267): 1–14. https://doi.org/10.1016/j.apsusc.2020.14526711. Lenshin A. S., Barkov K. A., Skopintseva N. G., Agapov B. L., Domashevskaya E. P. Influence of electrochemical etching modes under one stage and two Stage formation of porous silicon on the degree of oxidation of its surface layer under natural conditions. Kondensirovannye sredy i mezhfaznye granitsy = Condensed Matter and Interphases. 2019;21(4): 534–543. https://doi.org/10.17308/kcmf.2019.21/2364 (In Russ., abstract in Eng.) 12. Buttard D., Dolino G., Bellet D., Baumbach T., Rieutord F. X-ray reflectivity investigation of thin p-type porous silicon layers. Solid State Communications. 1998;109(1): 1–5. https://doi.org/10.1016/S0038-1098(98)00531-613. Lenshin A. S., Seredin P. V., Agapov B. L., Minakov D. A., Kashkarov V. M. Preparation and degradation of the optical properties of nano-, meso‑,and macroporous silicon. Materials Science in Semiconductor Processing. 2015;30: 25–30. https://doi.org/10.1016/j.mssp.2014.09.04014. Ksenofontova O. I., Vasin A. V., Egorov V. V., Bobyl’ A. V., Soldatenkov F. Yu., Terukov E. I., Ulin V. P., Ulin N. V., Kiselev O. I. Porous silicon and its applications in biology and medicine. Technical Physics. 2014;59(1): 66–77. https://doi.org/10.1134/S1063784214010083

Study of macroporous silicon electrochemical etching in 3D structured N type silicon substrates

2010 ◽  
Vol 8 (6) ◽  
pp. 1787-1791 ◽  
Author(s):  
Sebastien Kouassi ◽  
Gael Gautier ◽  
Sebastien Desplobain ◽  
Laurent Ventura
Keyword(s):  
Electrochemical Etching ◽  
Silicon Substrates ◽  
Macroporous Silicon ◽  
Type Silicon

scholarly journals Tuning of the Optical Properties in Photonic Crystals Made of Macroporous Silicon

2008 ◽  
Vol 2008 ◽  
pp. 1-12 ◽  
Author(s):  
Heinz-S. Kitzerow ◽  
Heinrich Matthias ◽  
Stefan L. Schweizer ◽  
Henry M. van Driel ◽  
Ralf B. Wehrspohn
Keyword(s):  
Photonic Crystals ◽  
Electrochemical Etching ◽  
Free Charge Carrier ◽  
Three Dimensional ◽  
Critical Discussion ◽  
Macroporous Silicon ◽  
Carrier Injection ◽  
Two Photon ◽  
Dielectric Liquids ◽  
Integrated Optical

It is well known that robust and reliable photonic crystal structures can be manufactured with very high precision by electrochemical etching of silicon wafers, which results in two- and three-dimensional photonic crystals made of macroporous silicon. However, tuning of the photonic properties is necessary in order to apply these promising structures in integrated optical devices. For this purpose, different effects have been studied, such as the infiltration with addressable dielectric liquids (liquid crystals), the utilization of Kerr-like nonlinearities of the silicon, or free-charge carrier injection by means of linear (one-photon) and nonlinear (two-photon) absorptions. The present article provides a review, critical discussion, and perspectives about state-of-the-art tuning capabilities.

Macroporous Silicon Fabricated by HF Electrochemical Etching for Antireflective Application in Solar Cells

2012 ◽  
Vol 463-464 ◽  
pp. 1410-1414
Author(s):  
Wei Ying Ou ◽  
Lei Zhao ◽  
Zhao Chen Li ◽  
Hong Wei Diao ◽  
Wen Jing Wang
Keyword(s):  
Solar Cells ◽  
Solar Cell ◽  
Hydrogen Fluoride ◽  
Pore Diameter ◽  
Electrochemical Etching ◽  
Macroporous Silicon ◽  
Pore Density ◽  
Wide Spectral Range ◽  
Application Potential ◽  
P Type

Macroporous silicon was fabricated by electrochemical etching in hydrogen fluoride (HF) electrolyte on P-type silicon wafers. By optimizing the etching condition, the obtained macroporous silicon presented pore diameter of about 2 μm and pore density of ~107/cm2. Such macroporous silicon gave out an excellent antireflective performance with the reflectance lower than 4% in a wide spectral range of 400-1000 nm. An a-Si:H/c-Si heterojunction solar cell was fabricated on such macroporous silicon to show its application potential.

New progress on p-type macroporous silicon electrodissolution

2002 ◽  
Vol 722 ◽  
Author(s):  
Paolo Bettotti ◽  
Zeno Gaburro ◽  
Luca Dal Negro ◽  
Lorenzo Pavesi
Keyword(s):  
Organic Compounds ◽  
Electrochemical Etching ◽  
Lattice Structures ◽  
Macroporous Silicon ◽  
Organic Electrolytes ◽  
Type Silicon ◽  
Lithographic Mask ◽  
P Type

AbstractWe discuss fabrication of macroporous structures, both random and periodical, on p-type silicon samples by electrochemical etching using aqueous and organic electrolytes. We have obtained different lattice structures starting from an unique lithographic mask. Organic compounds used in this work were Dimethylformamide (DMF) and Dimethylsulfoxide (DMSO).

Influence of etching current density on the morphology of macroporous silicon arrays by photo-electrochemical etching

2010 ◽  
Vol 31 (7) ◽  
pp. 074011 ◽  
Author(s):  
Wang Guozheng ◽  
Chen Li ◽  
Qin Xulei ◽  
Wang Ji ◽  
Wang Yang ◽  
...  
Keyword(s):  
Current Density ◽  
Electrochemical Etching ◽  
Macroporous Silicon ◽  
Silicon Arrays
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