Flexible surface acoustic wave strain sensor based on single crystalline LiNbO3thin film

2018 ◽  
Vol 112 (9) ◽  
pp. 093502 ◽  
Author(s):  
Hongsheng Xu ◽  
Shurong Dong ◽  
Weipeng Xuan ◽  
Umar Farooq ◽  
Shuyi Huang ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Strain Sensor ◽  
Single Crystalline ◽  
Flexible Surface

Flexible surface acoustic wave devices and its applications in microfluidics

2014 ◽  
Vol 1659 ◽  
pp. 27-33
Author(s):  
Jian Zhou ◽  
Xingli He ◽  
Wenbo Wang ◽  
Nana Hu ◽  
Hao Jin ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Electronics ◽  
Lamb Waves ◽  
Acoustic Streaming ◽  
Plastic Films ◽  
Saw Devices ◽  
Flexible Surface ◽  
Developed Surface ◽  
Acoustic Wave Devices

Abstract:Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.

Growth and Characterization of Polyimide-Supported AlN Films for Flexible Surface Acoustic Wave Devices

2016 ◽  
Vol 45 (6) ◽  
pp. 2702-2709 ◽  
Author(s):  
Qi Li ◽  
Hongyan Liu ◽  
Gen Li ◽  
Fei Zeng ◽  
Feng Pan ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Surface ◽  
Acoustic Wave Devices

Highly Sensitive Surface Acoustic Wave Flexible Strain Sensor

2019 ◽  
Vol 40 (6) ◽  
pp. 961-964 ◽  
Author(s):  
Qing Li ◽  
Jie Liu ◽  
Bin Yang ◽  
Lijun Lu ◽  
Zhiran Yi ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Strain Sensor ◽  
Highly Sensitive ◽  
Flexible Strain Sensor

Flexible dual-mode surface acoustic wave strain sensor based on crystalline LiNbO3 thin film

2018 ◽  
Vol 29 (2) ◽  
pp. 025003 ◽  
Author(s):  
Hongsheng Xu ◽  
Zhen Cao ◽  
Shurong Dong ◽  
Jinkai Chen ◽  
Weipeng Xuan ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Strain Sensor ◽  
Dual Mode

scholarly journals Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate

2012 ◽  
Vol 2012 ◽  
pp. 1-5 ◽  
Author(s):  
Jian Zhou ◽  
Shurong Dong ◽  
Hao Jin ◽  
Bing Feng ◽  
Demiao Wang
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Polymer Substrates ◽  
Lab On Chip ◽  
Flexible Surface ◽  
Aln Film ◽  
Surface Acoustic Wave Device ◽  
Acoustic Wave Devices ◽  
Acoustic Wave Device ◽  
Wave Device

Surface acoustic wave device withc-axis-oriented aluminum nitride (AlN) piezoelectric thin films on polymer substrates can be potentially used for development of flexible sensors, flexible microfluidic applications, microsystems, and lab-on-chip systems. In this work, the AlN films have been successfully deposited on polymer substrates using the DC reactive magnetron-sputtering method at room temperature, and the XRD, SEM, and AFM methods reveal that low deposition pressure is beneficial to the highlyc-axis-oriented AlN film on polymer substrates. Studies toward the development of AlN thin film-based flexible surface acoustic wave devices on the polymer substrates are initiated and the experimental and simulated results demonstrate the devices showing the acoustic wave velocity of 9000–10000 m/s, which indicate the AlN lamb wave.

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