Internal stress and opto-electronic properties of ZnO thin films deposited by reactive sputtering in various oxygen partial pressures

2017 ◽  
Vol 122 (15) ◽  
pp. 155306 ◽  
Author(s):  
Romain Tuyaerts ◽  
Olivier Poncelet ◽  
Jean-Pierre Raskin ◽  
Joris Proost
Keyword(s):  
Thin Films ◽  
Electronic Properties ◽  
Internal Stress ◽  
Reactive Sputtering ◽  
Zno Thin Films ◽  
Partial Pressures

Importance of substrate rotation speed on the growth of homogeneous ZnO thin films by reactive sputtering

2016 ◽  
Vol 169 ◽  
pp. 1-4 ◽  
Author(s):  
Vinoth Kumar Jayaraman ◽  
Yasuhiro Matsumoto Kuwabara ◽  
Arturo Maldonado Álvarez ◽  
María de la luz Olvera Amador
Keyword(s):  
Thin Films ◽  
Rotation Speed ◽  
Reactive Sputtering ◽  
Zno Thin Films ◽  
Substrate Rotation

Structural and nanomechanical properties of a-plane ZnO thin films deposited under different oxygen partial pressures

2012 ◽  
Vol 12 (3) ◽  
pp. 849-853 ◽  
Author(s):  
Sheng-Rui Jian ◽  
Hou-Guang Chen ◽  
Guo-Ju Chen ◽  
Jason S.C. Jang ◽  
Jenh-Yih Juang
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Nanomechanical Properties ◽  
Partial Pressures

Growth and Characterization of ZnO Thin Films Grown by Pulsed Laser Deposition

2011 ◽  
Vol 383-390 ◽  
pp. 6289-6292
Author(s):  
Jian Ting He ◽  
Bo Xue Tan ◽  
Qin Qin Wei ◽  
Yuan Bin Su ◽  
Shu Lian Yang
Keyword(s):  
Thin Films ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Pulsed Laser Deposition ◽  
Photoelectron Spectroscopy ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Zno Thin Films ◽  
X Ray ◽  
Partial Pressures

ZnO thin films were deposited on n-Si (111) substrates at various oxygen partial pressures by pulsed laser deposition (PLD). X-ray diffraction (XRD), scanning electron microscopy (SEM) were used to analyze the influence of the oxygen partial pressure on the crystallization and morphology of the ZnO thin films. An optimal crystallized ZnO thin film was observed at the oxygen partial pressure of 6.5Pa. X-ray photoelectron spectroscopy (XPS) was used to analyze the surface components and distribution status of various elments in ZnO thin films. It was found that ZnO thin films were grown in Zn-rich state.

Physical and electronic properties of electrodeposited ZnO thin films: dependence on thickness

2015 ◽  
Vol 89 (10) ◽  
pp. 1013-1023 ◽  
Author(s):  
N. Kıcır ◽  
O. M. Ozkendir ◽  
A. H. Farha ◽  
F. Kırmızıgül ◽  
T. Tuken ◽  
...  
Keyword(s):  
Thin Films ◽  
Electronic Properties ◽  
Zno Thin Films

scholarly journals Morphological Evolution of ZnO Thin Films Deposited by Reactive Sputtering

2004 ◽  
Vol 4 (1) ◽  
pp. 147-156 ◽  
Author(s):  
Eugenia Mirica ◽  
Glen Kowach ◽  
Paul Evans ◽  
Henry Du
Keyword(s):  
Thin Films ◽  
Morphological Evolution ◽  
Reactive Sputtering ◽  
Zno Thin Films

scholarly journals Correlation of structural properties with energy transfer of Eu-doped ZnO thin films prepared by sol-gel process and magnetron reactive sputtering

2010 ◽  
Vol 107 (12) ◽  
pp. 123522 ◽  
Author(s):  
Julien Petersen ◽  
Christelle Brimont ◽  
Mathieu Gallart ◽  
Guy Schmerber ◽  
Pierre Gilliot ◽  
...  
Keyword(s):  
Thin Films ◽  
Energy Transfer ◽  
Structural Properties ◽  
Sol Gel ◽  
Reactive Sputtering ◽  
Zno Thin Films ◽  
Sol Gel Process ◽  
Doped Zno
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