scholarly journals Metal negative ion production by a planar magnetron sputter type radio frequency ion source

Author(s):  
K. Yoshioka ◽  
S. Kanda ◽  
T. Kasuya ◽  
M. Wada
2000 ◽  
Vol 71 (2) ◽  
pp. 883-886 ◽  
Author(s):  
M. Uematsu ◽  
T. Morishita ◽  
A. Hatayama ◽  
T. Sakurabayashi ◽  
M. Ogasawara

2002 ◽  
Vol 73 (3) ◽  
pp. 1212-1216 ◽  
Author(s):  
Nam-Woong Paik ◽  
Steven Kim

2012 ◽  
Vol 83 (2) ◽  
pp. 02A313 ◽  
Author(s):  
R. Rácz ◽  
S. Biri ◽  
Z. Juhász ◽  
B. Sulik ◽  
J. Pálinkás

1990 ◽  
Vol 61 (1) ◽  
pp. 412-414 ◽  
Author(s):  
R. McAdams ◽  
R. F. King ◽  
A. F. Newman ◽  
A. J. T. Holmes

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