Metal negative ion production by a planar magnetron sputter type radio frequency ion source
Keyword(s):
2000 ◽
Vol 71
(2)
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pp. 883-886
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1996 ◽
Vol 67
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pp. 1012-1015
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2002 ◽
Vol 73
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pp. 1212-1216
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Keyword(s):
1990 ◽
2012 ◽
Vol 83
(2)
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pp. 02A313
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Keyword(s):
1990 ◽
Vol 61
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pp. 412-414
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