Nucleation and growth mechanisms of Al2O3 atomic layer deposition on synthetic polycrystalline MoS2
2017 ◽
Vol 146
(5)
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pp. 052810
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2014 ◽
Vol 118
(31)
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pp. 17655-17661
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2017 ◽
Vol 147
(15)
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pp. 154702
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2015 ◽
Vol 119
(6)
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pp. 3379-3387
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2016 ◽
Vol 34
(1)
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pp. 01A150
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2015 ◽
Vol 33
(1)
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pp. 01A128
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2017 ◽
Vol 29
(5)
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pp. 2232-2238
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