scholarly journals Simulation and fabrication of 0–3 composite PZT films for ultrahigh frequency (100–300 MHz) ultrasonic transducers

2016 ◽  
Vol 119 (9) ◽  
pp. 094103 ◽  
Author(s):  
Xiaoyang Chen ◽  
Chunlong Fei ◽  
Zeyu Chen ◽  
Ruimin Chen ◽  
Ping Yu ◽  
...  
Keyword(s):  
Ultrasonic Transducers ◽  
Ultrahigh Frequency ◽  
Pzt Films

Modification of microstructure on PZT films for ultrahigh frequency transducer

2015 ◽  
Vol 41 ◽  
pp. S650-S655 ◽  
Author(s):  
Chunlong Fei ◽  
Zeyu Chen ◽  
Wayne Ming Fong ◽  
Benpeng Zhu ◽  
Lingyan Wang ◽  
...  
Keyword(s):  
Ultrahigh Frequency ◽  
Pzt Films ◽  
Frequency Transducer

Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films

2012 ◽  
Vol 19 (2) ◽  
pp. 211-218 ◽  
Author(s):  
Junhong Li ◽  
Chenghao Wang ◽  
Jun Ma ◽  
Mengwei Liu
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Ultrasonic Transducers ◽  
Zirconate Titanate ◽  
Pzt Films

scholarly journals Measurements of acoustic radiation force of ultrahigh frequency ultrasonic transducers using model-based approach

2021 ◽  
Author(s):  
Sangnam Kim ◽  
Sunho Moon ◽  
Sunghoon Rho ◽  
Sangpil Yoon
Keyword(s):  
Single Cell ◽  
Acoustic Radiation ◽  
Ultrasonic Transducer ◽  
Radiation Force ◽  
Solid Sphere ◽  
Acoustic Radiation Force ◽  
Ultrasonic Transducers ◽  
Ultrahigh Frequency ◽  
Cell Phenotype ◽  
Target Cells

AbstractEven though ultrahigh frequency ultrasonic transducers over 60 MHz have been used for single cell level manipulation such as intracellular delivery, acoustic tweezers, and stimulation to investigate cell phenotype and cell mechanics, no techniques have been available to measure actual acoustic radiation force (ARF) applied to target cells. Therefore, we have developed an approach to measure ARF of ultrahigh frequency ultrasonic transducers using theoretical model of the dynamics of a solid sphere in a gelatin phantom. To estimate ARF at the focus of 130 MHz transducer, we matched measured maximum displacements of a solid sphere with theoretical calculations. We selected appropriate ranges of input voltages and pulse durations for single cell applications and estimated ARF were in the range of tens of pN to nN. FRET live cell imaging was demonstrated to visualize calcium transport between cells after a target single cell was stimulated by the developed ultrasonic transducer.

scholarly journals Ultrahigh Frequency (100 MHz–300 MHz) Ultrasonic Transducers for Optical Resolution Medical Imagining

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
Chunlong Fei ◽  
Chi Tat Chiu ◽  
Xiaoyang Chen ◽  
Zeyu Chen ◽  
Jianguo Ma ◽  
...  
Keyword(s):  
Optical Resolution ◽  
Ultrasonic Transducers ◽  
Ultrahigh Frequency ◽  
Medical Imagining

Probing the Spatial Impulse Response of Ultrahigh-Frequency Ultrasonic Transducers with Photoacoustic Waves

2020 ◽  
Vol 14 (3) ◽  
Author(s):  
Qiang-Bing Lu ◽  
Tuo Liu ◽  
Lei Ding ◽  
Ming-Hui Lu ◽  
Jie Zhu ◽  
...  
Keyword(s):  
Impulse Response ◽  
Ultrasonic Transducers ◽  
Ultrahigh Frequency

Integration of PZT on SOI Wafers: Increasing Piezoelectric Film Thickness for Providing a Wide Range of Ultrasonic MEMS Applications

2006 ◽  
Vol 969 ◽  
Author(s):  
Brahim Belgacem ◽  
Florian Calame ◽  
Paul Muralt
Keyword(s):  
Electromechanical Coupling ◽  
Piezoelectric Coefficient ◽  
Sol Gel ◽  
Equivalent Circuit Model ◽  
Ultrasonic Transducers ◽  
Electromechanical Coupling Coefficient ◽  
Wide Range ◽  
Pzt Films ◽  
Gel Technique ◽  
Quality Factor Q

AbstractPiezoelectric micromachined ultrasonic transducers comprising a 10 μm thick Si device layer and a 1-4 μm thick piezoelectric PZT layer were investigated. The PZT films were deposited by a sol-gel technique. The transverse piezoelectric coefficient was measured as -14.9 C/m2. The electromechanical coupling increased with PZT thickness, as expected. The influence of both the shape and area of the top electrode on the device performance has been investigated. The electromechanical coupling coefficient (k) and quality factor (Q) have been measured in air and were fitted to an equivalent circuit model. The maximal k2 was obtained as 7.8%.

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