Development of a miniature microwave electron cyclotron resonance plasma ion thruster for exospheric micro-propulsion

2015 ◽  
Vol 86 (12) ◽  
pp. 123505 ◽  
Author(s):  
Indranuj Dey ◽  
Yuji Toyoda ◽  
Naoji Yamamoto ◽  
Hideki Nakashima
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Ion Thruster ◽  
Micro Propulsion ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
Sign in / Sign up

Export Citation Format

Share Document