Low-loss, submicron chalcogenide integrated photonics with chlorine plasma etching

Jeff Chiles; Marcin Malinowski; Ashutosh Rao; Spencer Novak; Kathleen Richardson; Sasan Fathpour

doi:10.1063/1.4916207

Low-loss, submicron chalcogenide integrated photonics with chlorine plasma etching

Applied Physics Letters ◽

10.1063/1.4916207 ◽

2015 ◽

Vol 106 (11) ◽

pp. 111110 ◽

Cited By ~ 31

Author(s):

Jeff Chiles ◽

Marcin Malinowski ◽

Ashutosh Rao ◽

Spencer Novak ◽

Kathleen Richardson ◽

...

Keyword(s):

Plasma Etching ◽

Integrated Photonics ◽

Low Loss

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Erratum: “Low-loss, submicron chalcogenide integrated photonics with chlorine plasma etching” [Appl. Phys. Lett. 106, 111110 (2015)]

Applied Physics Letters ◽

10.1063/1.4960739 ◽

2016 ◽

Vol 109 (7) ◽

pp. 079903

Author(s):

Jeff Chiles ◽

Marcin Malinowski ◽

Ashutosh Rao ◽

Spencer Novak ◽

Kathleen Richardson ◽

...

Keyword(s):

Plasma Etching ◽

Integrated Photonics ◽

Low Loss

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Low loss polymer waveguides fabricated by plasma etching for nonlinear-optical devices operating at telecommunication wavelengths

Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Edition. CLEO '99. Conference on Lasers and Electro-Optics (IEEE Cat. No.99CH37013) ◽

10.1109/cleo.1999.834241 ◽

2003 ◽

Author(s):

T. Pliska ◽

V. Ricci ◽

A.-C. Le Duff ◽

M. Canva ◽

P. Raymond ◽

...

Keyword(s):

Plasma Etching ◽

Nonlinear Optical ◽

Optical Devices ◽

Polymer Waveguides ◽

Low Loss ◽

Nonlinear Optical Devices

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Low-loss Non-volatile Phase-change Integrated Photonics at 1550nm and 750nm

10.1364/cleo_si.2021.sth2h.6 ◽

2021 ◽

Author(s):

Zhuoran Fang ◽

Jiajiu Zheng ◽

Abhi Saxena ◽

James Whitehead ◽

Yueyang Chen ◽

...

Keyword(s):

Phase Change ◽

Integrated Photonics ◽

Low Loss ◽

Volatile Phase

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Fabrication of low loss polymer inverse ridge waveguide using inductively coupled plasma etching

Chinese Optics Letters ◽

10.3788/col201210.s12202 ◽

2012 ◽

Vol 10 (s1) ◽

pp. S12202-312205

Author(s):

Xiaoqiang Sun Xiaoqiang Sun ◽

Kun Zhang Kun Zhang ◽

Changming Chen Changming Chen ◽

Xiaodong Li Xiaodong Li ◽

Fei Wang Fei Wang ◽

...

Keyword(s):

Plasma Etching ◽

Inductively Coupled Plasma ◽

Ridge Waveguide ◽

Low Loss ◽

Inductively Coupled Plasma Etching ◽

Inductively Coupled

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Optimized low-loss integrated photonics silicon-nitride Y-branch splitter

10.1063/5.0011452 ◽

2020 ◽

Author(s):

I. A. Krutov ◽

M. Yu. Saygin ◽

I. V. Dyakonov ◽

S. P. Kulik

Keyword(s):

Silicon Nitride ◽

Integrated Photonics ◽

Low Loss

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Low-loss amorphous silicon wire waveguide for integrated photonics: effect of fabrication process and the thermal stability

Optics Express ◽

10.1364/oe.18.025283 ◽

2010 ◽

Vol 18 (24) ◽

pp. 25283 ◽

Cited By ~ 55

Author(s):

Shiyang Zhu ◽

G. Q. Lo ◽

D. L. Kwong

Keyword(s):

Thermal Stability ◽

Amorphous Silicon ◽

Fabrication Process ◽

Integrated Photonics ◽

Low Loss

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Low-loss integrated photonics for the blue and ultraviolet regime

APL Photonics ◽

10.1063/1.5052502 ◽

2019 ◽

Vol 4 (2) ◽

pp. 026101 ◽

Cited By ~ 19

Author(s):

Gavin N. West ◽

William Loh ◽

Dave Kharas ◽

Cheryl Sorace-Agaskar ◽

Karan K. Mehta ◽

...

Keyword(s):

Integrated Photonics ◽

Low Loss

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Optimized oxygen plasma etching of polyimide films for low loss optical waveguides

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1494816 ◽

2002 ◽

Vol 20 (5) ◽

pp. 1587-1591 ◽

Cited By ~ 29

Author(s):

Navnit Agarwal ◽

Shom Ponoth ◽

Joel Plawsky ◽

P. D. Persans

Keyword(s):

Plasma Etching ◽

Optical Waveguides ◽

Oxygen Plasma ◽

Polyimide Films ◽

Low Loss ◽

Oxygen Plasma Etching

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Optimized Oxygen Plasma Etching of Polycarbonate for Low-Loss Optical Waveguide Fabrication

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.3215 ◽

2001 ◽

Vol 40 (Part 1, No. 5A) ◽

pp. 3215-3219 ◽

Cited By ~ 19

Author(s):

Jae-Wook Kang ◽

Joon-Sung Kim ◽

Jang-Joo Kim

Keyword(s):

Optical Waveguide ◽

Plasma Etching ◽

Oxygen Plasma ◽

Low Loss ◽

Oxygen Plasma Etching ◽

Waveguide Fabrication

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Low Index Asymmetric Bound States in the Continuum for Low Loss Integrated Photonics

Conference on Lasers and Electro-Optics ◽

10.1364/cleo_si.2020.sm1j.2 ◽

2020 ◽

Author(s):

Larissa Vertchenko ◽

Radu Malureanu ◽

Clayton DeVault ◽

Eric Mazur ◽

Andrei V. Lavrinenko

Keyword(s):

Bound States ◽

Integrated Photonics ◽

Low Loss ◽

The Continuum

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