Tailoring of electron energy distributions in low-pressure inductive discharges
1967 ◽
Vol 296
(1445)
◽
pp. 233-242
◽
Keyword(s):
Keyword(s):
2011 ◽
Vol 13
(3)
◽
pp. 267-278
◽
2010 ◽
Vol 19
(6)
◽
pp. 065001
◽
Keyword(s):
2004 ◽
Vol 37
(19)
◽
pp. R217-R236
◽
1975 ◽
Vol 8
(6)
◽
pp. 629-639
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